Inventor · disambiguated record
Marc Antonius Maria Haast
Also filed as: HAAST MARC ANTONIUS MARIA
9 granted patents·1 pending application·122 citations·filing 2004–2012
87Inventor score
Files withASML NETHERLANDS BV6NIHTIANOV STOYAN2SCHIMMEL HENDRIKUS GIJSBERTUS1VAN DE KERKHOF MARCUS ADRIANUS1
Top patents by PatentIndex Score
10 records- 0194US7586108B2Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detectorASML NETHERLANDS BV·Filed 2007·Granted Sep 8, 2009·56 cites·19 claims
- 0291US8138485B2Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detectorNIHTIANOV STOYAN·Filed 2008·Granted Mar 20, 2012·35 cites·29 claims
- 0389US7282701B2Sensor for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Oct 16, 2007·12 cites·3 claims
- 0486US7453078B2Sensor for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Nov 18, 2008·8 cites·3 claims
- 0581US8426831B2Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detectorNIHTIANOV STOYAN·Filed 2012·Granted Apr 23, 2013·6 cites·26 claims
- 0681US7655367B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Feb 2, 2010·5 cites·14 claims
- 0758US2010091260A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 0852US8629418B2Lithographic apparatus and sensor thereforVAN DE KERKHOF MARCUS ADRIANUS·Filed 2006·Granted Jan 14, 2014·0 cites·23 claims
- 0944US8711325B2Method and system for determining a suppression factor of a suppression system and a lithographic apparatusSCHIMMEL HENDRIKUS GIJSBERTUS·Filed 2008·Granted Apr 29, 2014·0 cites·22 claims
- 1041US7145630B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 5, 2006·0 cites·32 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →