Inventor · disambiguated record
Mark Hawkins
Also filed as: HAWKINS MARK · HAWKINS MARK R · HAWKINS MARK RICHARD
48 granted patents·2 pending applications·6,431 citations·filing 1987–2022
99Inventor score
Top patents by PatentIndex Score
50 records- 0199US6692576B2Wafer support systemASM INC·Filed 2002·Granted Feb 17, 2004·552 cites·11 claims
- 0299US6093252AProcess chamber with inner supportASM INC·Filed 1996·Granted Jul 25, 2000·638 cites·49 claims
- 0399US6053982AWafer support systemASM INC·Filed 1996·Granted Apr 25, 2000·690 cites·30 claims
- 0499US5221556AGas injectors for reaction chambers in CVD systemsEPSILON TECHN INC·Filed 1987·Granted Jun 22, 1993·755 cites·9 claims
- 0598US6821825B2Process for deposition of semiconductor filmsASM INC·Filed 2002·Granted Nov 23, 2004·311 cites·25 claims
- 0698US6126744AMethod and system for adjusting semiconductor processing equipmentASM INC·Filed 1997·Granted Oct 3, 2000·423 cites·24 claims
- 0798US5997588ASemiconductor processing system with gas curtainADVANCED SEMICONDUCTOR MAT·Filed 1996·Granted Dec 7, 1999·664 cites·40 claims
- 0898US4828224AChemical vapor deposition systemEPSILON TECHN INC·Filed 1987·Granted May 9, 1989·557 cites·2 claims
- 0996US6343183B1Wafer support systemASM INC·Filed 2000·Granted Jan 29, 2002·87 cites·6 claims
- 1096US5469356ASystem for controlling a vehicle to selectively allow operation in either an autonomous mode or a manual modeCATERPILLAR INC·Filed 1994·Granted Nov 21, 1995·178 cites·12 claims
- 1195US7648579B2Substrate support system for reduced autodoping and backside depositionASM INC·Filed 2005·Granted Jan 19, 2010·42 cites·30 claims
- 1295US6203622B1Wafer support systemASM INC·Filed 2000·Granted Mar 20, 2001·85 cites·34 claims
- 1394US10167557B2Gas distribution system, reactor including the system, and methods of using the sameASM IP HOLDING BV·Filed 2014·Granted Jan 1, 2019·446 cites·17 claims
- 1493US5020475ASubstrate handling and transporting apparatusEPSILON TECHN INC·Filed 1989·Granted Jun 4, 1991·64 cites·40 claims
- 1592US6491757B2Wafer support systemASM INC·Filed 2001·Granted Dec 10, 2002·42 cites·24 claims
- 1692US6113702AWafer support systemASM INC·Filed 1997·Granted Sep 5, 2000·93 cites·29 claims
- 1791US6454866B1Wafer support systemASM INC·Filed 2000·Granted Sep 24, 2002·38 cites·9 claims
- 1890US6709267B1Substrate holder with deep annular groove to prevent edge heat lossASM INC·Filed 2002·Granted Mar 23, 2004·51 cites·52 claims
- 1990US5092728ASubstrate loading apparatus for a CVD processEPSILON TECHN INC·Filed 1989·Granted Mar 3, 1992·51 cites·7 claims
- 2089US5525157AGas injectors for reaction chambers in CVD systemsADVANCED SEMICONDUCTOR MAT·Filed 1995·Granted Jun 11, 1996·48 cites·7 claims
- 2188US5411590AGas injectors for reaction chambers in CVD systemsADVANCED SEMICONDUCTOR MAT·Filed 1991·Granted May 2, 1995·47 cites·14 claims
- 2287US10604847B2Gas distribution system, reactor including the system, and methods of using the sameASM IP HOLDING BV·Filed 2018·Granted Mar 31, 2020·3 cites·6 claims
- 2387US5435682AChemical vapor desposition systemADVANCED SEMICONDUCTOR MAT·Filed 1994·Granted Jul 25, 1995·74 cites·10 claims
- 2486US8088225B2Substrate support system for reduced autodoping and backside depositionGOODMAN MATT G·Filed 2009·Granted Jan 3, 2012·17 cites·13 claims
- 2586US8047706B2Calibration of temperature control system for semiconductor processing chamberASM INC·Filed 2008·Granted Nov 1, 2011·18 cites·28 claims
- 2686US5823295ALubrication control system for a work machineCATERPILLAR INC·Filed 1996·Granted Oct 20, 1998·63 cites·16 claims
- 2785US4874464AProcess for epitaxial deposition of siliconEPSILON LP·Filed 1988·Granted Oct 17, 1989·36 cites·21 claims
- 2881US8360001B2Process for deposition of semiconductor filmsASM INC·Filed 2009·Granted Jan 29, 2013·3 cites·16 claims
- 2980US7655093B2Wafer support systemASM INC·Filed 2007·Granted Feb 2, 2010·4 cites·17 claims
- 3080US5458918AGas injectors for reaction chambers in CVD systemsADVANCED SEMICONDUCTOR MAT·Filed 1993·Granted Oct 17, 1995·30 cites·11 claims
- 3179US5925081ASystem and method for managing access to a load resource having a loading machineCATERPILLAR INC·Filed 1996·Granted Jul 20, 1999·58 cites·35 claims
- 3278US5156521AMethod for loading a substrate into a GVD apparatusEPSILON TECHN INC·Filed 1991·Granted Oct 20, 1992·30 cites·13 claims
- 3377US7585752B2Process for deposition of semiconductor filmsASM INC·Filed 2004·Granted Sep 8, 2009·9 cites·46 claims
- 3477US6032093AApparatus and method for restricting implement movement of a work machineCATERPILLAR INC·Filed 1996·Granted Feb 29, 2000·49 cites·15 claims
- 3577US5819684AGas injection system for reaction chambers in CVD systemsFiled 1996·Granted Oct 13, 1998·22 cites·5 claims
- 3675US12043899B2Reactor system and method to reduce residue buildup during a film deposition processASM IP HOLDING BV·Filed 2022·Granted Jul 23, 2024·0 cites·18 claims
- 3775US11085112B2Susceptor with ring to limit backside depositionHAWKINS MARK·Filed 2011·Granted Aug 10, 2021·4 cites·15 claims
- 3874US5564274ACold oil protection circuit for a hydraulic systemCATERPILLAR INC·Filed 1995·Granted Oct 15, 1996·25 cites·7 claims
- 3973US6879777B2Localized heating of substrates using opticsASM INC·Filed 2002·Granted Apr 12, 2005·16 cites·21 claims
- 4069US6861321B2Method of loading a wafer onto a wafer holder to reduce thermal shockASM INC·Filed 2002·Granted Mar 1, 2005·14 cites·28 claims
- 4168US11885019B2Susceptor with ring to limit backside depositionASM IP HOLDING BV·Filed 2021·Granted Jan 30, 2024·0 cites·20 claims
- 4263US11390950B2Reactor system and method to reduce residue buildup during a film deposition processASM IP HOLDING BV·Filed 2017·Granted Jul 19, 2022·0 cites·20 claims
- 4362US5897595ASystem and method for managing access of a fleet of mobile machines to a resource having multiple entry pointsCATERPILLAR INC·Filed 1996·Granted Apr 27, 1999·28 cites·22 claims
- 4460US5511457ASteering control system for an autonomous machineCATERPILLAR INC·Filed 1994·Granted Apr 30, 1996·21 cites·12 claims
- 4556US6131061AApparatus and method for preventing underdigging of a work machineCATERPILLAR INC·Filed 1997·Granted Oct 10, 2000·23 cites·19 claims
- 4654US7186298B2Wafer support systemASM INC·Filed 2003·Granted Mar 6, 2007·2 cites·8 claims
- 4749US2010116207A1Reaction chamberASM INC·Filed 2009·Application pending·0 cites
- 4848US5467240ADriver circuit with diagnostics and over voltage protectionCATERPILLAR INC·Filed 1993·Granted Nov 14, 1995·13 cites·12 claims
- 4938US2005176252A1Two-stage load for processing both sides of a waferFiled 2004·Application pending·0 cites
- 5037US5450082ASingle multi-purpose input for different types of sensors with data edge conditioning circuit or ADC to provide digital outputCATERPILLAR INC·Filed 1993·Granted Sep 12, 1995·7 cites·5 claims
Join the waitlist — get patent alerts
Get an alert when Mark Hawkins files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →