Inventor · disambiguated record
Matthias Kaes
Also filed as: KAES MATTHIAS
1 granted patent·1 pending application·2 citations·filing 2021–2025
19Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0183US11415892B2Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2021·Granted Aug 16, 2022·2 cites·9 claims
- 0265US2025231399A1Mirror, in particular for a microlithographic projection exposure apparatus, and method of processing a mirrorZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →