Inventor · disambiguated record
Masaya Kawamata
Also filed as: KAWAMATA MASAYA
6 granted patents·1 pending application·48 citations·filing 2011–2015
78Inventor score
Top patents by PatentIndex Score
7 records- 0193US9460893B2Substrate processing apparatusKAWAMATA MASAYA·Filed 2012·Granted Oct 4, 2016·27 cites·9 claims
- 0291US9349619B2Plasma etching method and plasma etching apparatusKAWAMATA MASAYA·Filed 2012·Granted May 24, 2016·16 cites·5 claims
- 0380US9202707B2Semiconductor device manufacturing methodTOKYO ELECTRON LTD·Filed 2013·Granted Dec 1, 2015·5 cites·8 claims
- 0447US9887109B2Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Feb 6, 2018·0 cites·7 claims
- 0543US9583361B2Method of processing target object and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Feb 28, 2017·0 cites·10 claims
- 0642US9502219B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Nov 22, 2016·0 cites·5 claims
- 0740US2013237053A1Film forming method and film forming apparatusISHIZAKA TADAHIRO·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →