Inventor · disambiguated record
Marc M. Kollrack
Also filed as: KOLLRACK MARC · KOLLRACK MARC M · KOLLRACK MARC MICHAEL
5 granted patents·1 pending application·303 citations·filing 1993–2022
85Inventor score
Top patents by PatentIndex Score
6 records- 0193US5399387APlasma CVD of silicon nitride thin films on large area glass substrates at high deposition ratesAPPLIED MATERIALS INC·Filed 1994·Granted Mar 21, 1995·127 cites·7 claims
- 0284US5380566AMethod of limiting sticking of body to susceptor in a deposition treatmentAPPLIED MATERIALS INC·Filed 1993·Granted Jan 10, 1995·55 cites·19 claims
- 0377US6338874B1Method for multilayer CVD processing in a single chamberAPPLIED MATERIALS INC·Filed 1995·Granted Jan 15, 2002·59 cites·24 claims
- 0471US6444277B1Method for depositing amorphous silicon thin films onto large area glass substrates by chemical vapor deposition at high deposition ratesAPPLIED MATERIALS INC·Filed 1994·Granted Sep 3, 2002·50 cites·11 claims
- 0552US2024344201A1Showerhead temperature based deposition time compensation for thickness trending in pecvd deposition systemLAM RES CORP·Filed 2022·Application pending·0 cites
- 0640US6225601B1Heating a substrate support in a substrate handling chamberAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted May 1, 2001·12 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →