Inventor · disambiguated record
Martin M. Liphardt
Also filed as: LIPHARDT MARTIN M
122 granted patents·2 pending applications·1,083 citations·filing 2000–2024
99Inventor score
Files withJ A WOOLLAM CO INC84LIPHARDT MARTIN M18HERZINGER CRAIG M6PFEIFFER GALEN L3HILFIKER JAMES N2
Top patents by PatentIndex Score
124 records- 0198US7633625B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2007·Granted Dec 15, 2009·115 cites·2 claims
- 0297US7907280B2Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslationJ A WOOLLAM CO INC·Filed 2008·Granted Mar 15, 2011·94 cites·28 claims
- 0396US7616319B1Spectroscopic ellipsometer and polarimeter systemsJAMES D WELCH·Filed 2007·Granted Nov 10, 2009·117 cites·67 claims
- 0491US6982792B1Spectrophotometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2003·Granted Jan 3, 2006·49 cites·26 claims
- 0591US6456376B1Rotating compensator ellipsometer system with spatial filterJ A WOOLLAM CO INC·Filed 2001·Granted Sep 24, 2002·42 cites·37 claims
- 0690US8705032B2Terahertz-infrared ellipsometer system, and method of useHERZINGER CRAIG M·Filed 2013·Granted Apr 22, 2014·7 cites·21 claims
- 0790US7492455B1Discrete polarization state spectroscopic ellipsometer system and method of useJ A WOOLLAM CO INC·Filed 2006·Granted Feb 17, 2009·22 cites·6 claims
- 0890US7084978B1Sample orientation system and methodJ A WOOLLAM CO INC·Filed 2005·Granted Aug 1, 2006·15 cites·17 claims
- 0989US10627288B1Systems and methods for producing a more uniform intensity wavelength dispersed beam of electromagnetic radiation entering a multielement detector, while maintaining information content thereinJ A WOOLLAM CO INC·Filed 2019·Granted Apr 21, 2020·3 cites·20 claims
- 1089US8416408B1Terahertz-infrared ellipsometer system, and method of useHERZINGER CRAIG M·Filed 2010·Granted Apr 9, 2013·8 cites·11 claims
- 1189US7505134B1Automated ellipsometer and the like systemsJ A WOOLLAM CO INC·Filed 2006·Granted Mar 17, 2009·15 cites·22 claims
- 1288US10338362B1Beam focusing and reflecting optics with enhanced detector systemJ A WOOLLAM CO INC·Filed 2018·Granted Jul 2, 2019·3 cites·20 claims
- 1388US7746471B1Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systemsJ A WOOLLAM CO INC·Filed 2007·Granted Jun 29, 2010·13 cites·32 claims
- 1487US8436994B2Fast sample height, AOI and POI alignment in mapping ellipsometer or the likeLIPHARDT MARTIN M·Filed 2011·Granted May 7, 2013·7 cites·7 claims
- 1587US8351036B1System for naturally adjusting the cross-sectional area of a beam of electromagnetic radiation entered to a focusing meansJ A WOOLLAM CO INC·Filed 2010·Granted Jan 8, 2013·8 cites·39 claims
- 1687US7768660B1Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sampleJ A WOOLLAM CO INC·Filed 2007·Granted Aug 3, 2010·12 cites·23 claims
- 1787US7468794B1Rotating compensator ellipsometer system with spatial filter equivalentJ A WOOLLAM CO INC·Filed 2005·Granted Dec 23, 2008·12 cites·29 claims
- 1887US7277171B1Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systemsJ A WOOLLAN CO INC·Filed 2005·Granted Oct 2, 2007·18 cites·19 claims
- 1986US8749785B2Operation of an electromagnetic radiation focusing elementJ A WOOLLAM CO INC·Filed 2012·Granted Jun 10, 2014·8 cites·39 claims
- 2086US8339603B1Mapping ellipsometers and polarimeters comprising polarization state compensating beam directing means, and method of useLIPHARDT MARTIN M·Filed 2009·Granted Dec 25, 2012·10 cites·17 claims
- 2186US7426030B1Reduced gas flow purging system in reflectometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2007·Granted Sep 16, 2008·14 cites·5 claims
- 2286US7336361B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2005·Granted Feb 26, 2008·15 cites·26 claims
- 2386US6859278B1Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systemsJ A WOOLLAM CO INC·Filed 2002·Granted Feb 22, 2005·29 cites·19 claims
- 2485US9500843B1Beam focusing and beam collecting opticsJ A WOOLLAM CO INC·Filed 2016·Granted Nov 22, 2016·4 cites·5 claims
- 2585US7872751B2Fast sample height, AOI and POI alignment in mapping ellipsometer or the likeJ A WOOLLAM CO INC·Filed 2008·Granted Jan 18, 2011·10 cites·29 claims
- 2685US7333198B1Sample orientation system and methodJ A WOOLLAM CO INC·Filed 2006·Granted Feb 19, 2008·10 cites·4 claims
- 2783US9933357B1Elliposometer system with polarization state generator and polarization state analyzer in environmental chamberJ A WOOLLAM CO INC·Filed 2017·Granted Apr 3, 2018·2 cites·10 claims
- 2883US8339602B1View-finder in ellipsometer or the like systemsLIPHARDT MARTIN M·Filed 2009·Granted Dec 25, 2012·8 cites·16 claims
- 2983US7746472B1Automated ellipsometer and the like systemsJ A WOOLLAM CO INC·Filed 2008·Granted Jun 29, 2010·8 cites·29 claims
- 3083US7345762B1Control of beam spot size in ellipsometer and the like systemsJ A WOOLLAM CO INC·Filed 2005·Granted Mar 18, 2008·8 cites·21 claims
- 3183US7075650B1Discrete polarization state spectroscopic ellipsometer system and method of useJ A WOOLLAM CO INC·Filed 2003·Granted Jul 11, 2006·22 cites·28 claims
- 3282US12405210B1System for, and calibration and testing of directed beam ellipsometer systemsJ A WOOLLAM CO INC·Filed 2023·Granted Sep 2, 2025·0 cites·4 claims
- 3382US10247611B1Enhanced detector operation made possible by application of a functional plurality of gratings and combination dichroic beam splitter-prismsLIPHARDT MARTIN M·Filed 2015·Granted Apr 2, 2019·3 cites·30 claims
- 3482US8953030B1System for viewing samples that are undergoing ellipsometric investigation in real timeLIPHARDT MARTIN M·Filed 2012·Granted Feb 10, 2015·4 cites·4 claims
- 3582US8248606B1Sample mapping in environmental chamberLIPHARDT MARTIN M·Filed 2009·Granted Aug 21, 2012·7 cites·11 claims
- 3682US8169611B2Terahertz-infrared ellipsometer system, and method of useHERZINGER CRAIG M·Filed 2009·Granted May 1, 2012·10 cites·23 claims
- 3782US7821637B1System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizingJ A WOOLLAM CO INC·Filed 2008·Granted Oct 26, 2010·8 cites·3 claims
- 3882US7304737B1Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidenceJ A WOOLLAM CO INC·Filed 2006·Granted Dec 4, 2007·8 cites·17 claims
- 3982US7304792B1System for sequentially providing aberation corrected electromagnetic radiation to a spot on a sample at multiple angles of incidenceJ A WOOLLAM CO INC·Filed 2006·Granted Dec 4, 2007·11 cites·9 claims
- 4082US7158231B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2003·Granted Jan 2, 2007·26 cites·28 claims
- 4182US6804004B1Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetryJ A WOOLLAM CO INC·Filed 2000·Granted Oct 12, 2004·21 cites·30 claims
- 4281US10989601B1Beam focusing and reflective opticsJ A WOOLLAM CO INC·Filed 2020·Granted Apr 27, 2021·1 cites·17 claims
- 4381US10132684B1Reflectometer, spectrophometer, ellipsometer and polarimeter system with a super continuum laser-source of a beam of electromagnetism and improved detector systemJ A WOOLLAM CO INC·Filed 2016·Granted Nov 20, 2018·3 cites·3 claims
- 4481US9442016B2Reflective focusing opticsJ A WOOLLAM CO INC·Filed 2014·Granted Sep 13, 2016·4 cites·18 claims
- 4581US8493565B1Small volume cellPFEIFFER GALEN L·Filed 2012·Granted Jul 23, 2013·4 cites·12 claims
- 4681US7489400B1System and method of applying xenon arc-lamps to provide 193 nm wavelengthsJ A WOOLLAM CO INC·Filed 2006·Granted Feb 10, 2009·7 cites·28 claims
- 4780US9921395B1Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam areaJ A WOOLLAM CO INC·Filed 2016·Granted Mar 20, 2018·3 cites·38 claims
- 4880US7274450B1Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2004·Granted Sep 25, 2007·19 cites·9 claims
- 4979US8253940B1UV-IR range variable angle spectroscopic ellipsometerGREEN STEVEN E·Filed 2010·Granted Aug 28, 2012·7 cites·12 claims
- 5079US7477388B1Sample masking in ellipsometer and the like systems including detection of substrate backside reflectionsJ A WOOLLAM CO INC·Filed 2006·Granted Jan 13, 2009·6 cites·20 claims
Showing the top 50 of 124 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →