Inventor · disambiguated record
Matthew Lipson
Also filed as: LIPSON MATTHEW · LIPSON MATTHEW MICHAEL
35 granted patents·8 pending applications·347 citations·filing 1999–2022
97Inventor score
Files withASML HOLDING NV18ASML NETHERLANDS BV9LIPSON MATTHEW3CALIFORNIA INST OF TECHN2SIROS TECHNOLOGIES INC2
Top patents by PatentIndex Score
43 records- 0194US10558129B2Mask assemblyASML NETHERLANDS BV·Filed 2015·Granted Feb 11, 2020·7 cites·44 claims
- 0294US6608228B1Two-photon or higher-order absorbing optical materials for generation of reactive speciesCALIFORNIA INST OF TECHN·Filed 1999·Granted Aug 19, 2003·61 cites·19 claims
- 0394US6574174B1Optical data storage system with multiple layer mediaSIROS TECHNOLOGIES INC·Filed 2000·Granted Jun 3, 2003·100 cites·25 claims
- 0489US6512606B1Optical storage media and method for optical data storage via local changes in reflectivity of a format gratingSIROS TECHNOLOGIES INC·Filed 1999·Granted Jan 28, 2003·62 cites·12 claims
- 0588US10001713B2Lithographic apparatus and methodASML HOLDING NV·Filed 2014·Granted Jun 19, 2018·7 cites·15 claims
- 0686US7423732B2Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil planeASML HOLDING NV·Filed 2005·Granted Sep 9, 2008·8 cites·9 claims
- 0784US8597549B2Two-photon or higher-order absorbing optical materials for generation of reactive speciesCUMPSTON BRIAN·Filed 2007·Granted Dec 3, 2013·19 cites·20 claims
- 0882US7081278B2Method for protection of adhesives used to secure optics from ultra-violet lightASML HOLDINGS N V·Filed 2002·Granted Jul 25, 2006·21 cites·4 claims
- 0980US7678458B2Bonding silicon silicon carbide to glass ceramicsASML HOLDING NV·Filed 2007·Granted Mar 16, 2010·6 cites·13 claims
- 1079US7235194B2Two-photon or higher-order absorbing optical materials for generation of reactive speciesCALIFORNIA INST OF TECHN·Filed 2003·Granted Jun 26, 2007·11 cites·28 claims
- 1176US12111581B2Method to manufacture nano ridges in hard ceramic coatingsASML HOLDING NV·Filed 2019·Granted Oct 8, 2024·2 cites·18 claims
- 1276US10310391B2Electrostatic clamp and a method for manufacturing the sameASML HOLDING NV·Filed 2015·Granted Jun 4, 2019·3 cites·7 claims
- 1373US7781029B2Side seal for wet lens elementsASML HOLDING NV·Filed 2006·Granted Aug 24, 2010·6 cites·12 claims
- 1468US11009803B2Mask assemblyASML NETHERLANDS BV·Filed 2019·Granted May 18, 2021·0 cites·18 claims
- 1568US8168017B2Bonding silicon silicon carbide to glass ceramicsLIPSON MATTHEW·Filed 2010·Granted May 1, 2012·2 cites·3 claims
- 1668US7129006B2Optical data storage system and methodRES INVESTMENT NETWORK INC·Filed 2002·Granted Oct 31, 2006·11 cites·10 claims
- 1767US2019086819A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 1865US12117731B2Method for producing a mirror of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2022·Granted Oct 15, 2024·0 cites·17 claims
- 1965US9606448B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·2 cites·39 claims
- 2065US9330912B2Lithographic apparatus, fluid combining unit and device manufacturing methodMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2011·Granted May 3, 2016·1 cites·19 claims
- 2165US7180573B2System and method to block unwanted light reflecting from a pattern generating portion from reaching an objectASML HOLDING NV·Filed 2004·Granted Feb 20, 2007·6 cites·27 claims
- 2264US2008038456A1Method of covering clear aperture of optic during deposition of glue protection layerASML HOLDING NV·Filed 2007·Application pending·0 cites
- 2363US8208123B2Lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2004·Granted Jun 26, 2012·6 cites·40 claims
- 2463US8045135B2Lithographic apparatus with a fluid combining unit and related device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Oct 25, 2011·1 cites·18 claims
- 2562US2008017106A1Apparatus to Modify the Spatial Response of a Pattern GeneratorASML HOLDING NV·Filed 2007·Application pending·0 cites
- 2656US10908518B2Lithographic apparatus and methodASML HOLDING NV·Filed 2018·Granted Feb 2, 2021·0 cites·19 claims
- 2756US7894040B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 22, 2011·3 cites·38 claims
- 2855US10146142B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Dec 4, 2018·0 cites·20 claims
- 2955US9348236B2Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clampHELMUS PETER RICHARD·Filed 2011·Granted May 24, 2016·1 cites·22 claims
- 3054US8755027B2Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluidLIPSON MATTHEW·Filed 2011·Granted Jun 17, 2014·0 cites·20 claims
- 3154US8027026B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2011·Granted Sep 27, 2011·0 cites·20 claims
- 3254US7335398B2Method to modify the spatial response of a pattern generatorASML HOLDING NV·Filed 2004·Granted Feb 26, 2008·1 cites·21 claims
- 3353US2005153064A1Method of covering clear aperture of optic during deposition of glue protection layerASML HOLDING NV·Filed 2004·Application pending·0 cites
- 3451US11016401B2Substrates and methods of using those substratesASML HOLDING NV·Filed 2018·Granted May 25, 2021·0 cites·21 claims
- 3550US12189310B2Systems and methods for manufacturing a double-sided electrostatic clampASML HOLDING NV·Filed 2020·Granted Jan 7, 2025·0 cites·20 claims
- 3650US11988971B2Lithographic apparatus, substrate table, and methodASML HOLDING NV·Filed 2020·Granted May 21, 2024·0 cites·20 claims
- 3749US9442388B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 13, 2016·0 cites·20 claims
- 3846US11520241B2Lithography supports with defined burltop topographyASML HOLDING NV·Filed 2018·Granted Dec 6, 2022·0 cites·20 claims
- 3946US2023031443A1Wafer clamp hard burl production and refurbishmentASML HOLDING NV·Filed 2020·Application pending·0 cites
- 4045US9195148B2Side seal for wet lens elementsLIPSON MATTHEW·Filed 2010·Granted Nov 24, 2015·0 cites·21 claims
- 4140US2022236649A1Split double sided wafer and reticle clampsASML HOLDING NV·Filed 2020·Application pending·0 cites
- 4230US2001030934A1Optical storage media and method for optical data storage via local changes in reflectivity of a format gratingFiled 1999·Application pending·0 cites
- 4330US2018239311A1Method and Apparatus for Controlling an Environment Management System within a BuildingENERGY TECH INSTITUTE LLP·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →