Inventor · disambiguated record
Matthew B. Lutzker
Also filed as: LUTZKER MATTHEW B
2 granted patents·448 citations·filing 1986–1992
72Inventor score
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2 records- 0195US4805123AAutomatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systemsKLA INSTR CORP·Filed 1986·Granted Feb 14, 1989·369 cites·52 claims
- 0290US5241366AThin film thickness monitorTENCOR INSTRUMENTS·Filed 1992·Granted Aug 31, 1993·79 cites·38 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →