Inventor · disambiguated record
Masahiro Miyagi
Also filed as: MIYAGI MASAHIRO
26 granted patents·10 pending applications·371 citations·filing 1977–2022
96Inventor score
Top patents by PatentIndex Score
36 records- 0193US5975098AApparatus for and method of cleaning substrateDAINIPPON SCREEN MFG·Filed 1996·Granted Nov 2, 1999·171 cites·27 claims
- 0291US9713822B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2014·Granted Jul 25, 2017·10 cites·6 claims
- 0388US10629459B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted Apr 21, 2020·3 cites·19 claims
- 0487US9640382B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2015·Granted May 2, 2017·5 cites·7 claims
- 0585US8883030B2Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2012·Granted Nov 11, 2014·6 cites·11 claims
- 0684US10761422B2Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Sep 1, 2020·3 cites·13 claims
- 0773US9142433B2Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2012·Granted Sep 22, 2015·3 cites·14 claims
- 0872US5763892AUltraviolet irradiator for substrate, substrate treatment system, and method of irradiating substrate with ultraviolet lightDAINIPPON SCREEN MFG·Filed 1996·Granted Jun 9, 1998·51 cites·19 claims
- 0971US9852931B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2014·Granted Dec 26, 2017·1 cites·20 claims
- 1071US8815048B2Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2007·Granted Aug 26, 2014·2 cites·4 claims
- 1170US9396974B2Substrate processing apparatus and substrate processing methodTAKAHASHI HIROAKI·Filed 2011·Granted Jul 19, 2016·2 cites·10 claims
- 1270US7958899B2Substrate cleaning apparatus and substrate cleaning methodDAINIPPON SCREEN MFG·Filed 2008·Granted Jun 14, 2011·3 cites·16 claims
- 1369US7169269B2Plating apparatus, plating cup and cathode ringDAINIPPON SCREEN MFG·Filed 2003·Granted Jan 30, 2007·11 cites·24 claims
- 1468US4698904AApparatus for assembling fins and tubes for heat exchangersHITACHI LTD·Filed 1986·Granted Oct 13, 1987·21 cites·3 claims
- 1568US4597171ATube-enlarging press for use in heat exchanger fabricationHITACHI LTD·Filed 1984·Granted Jul 1, 1986·22 cites·2 claims
- 1666US2020035518A1Substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2019·Application pending·0 cites
- 1765US10133173B2Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing methodSCREEN HOLDINGS CO LTD·Filed 2013·Granted Nov 20, 2018·1 cites·42 claims
- 1863US9601357B2Substrate processing device and substrate processing methodHASHIMOTO KOJI·Filed 2012·Granted Mar 21, 2017·1 cites·20 claims
- 1963US9576808B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2013·Granted Feb 21, 2017·1 cites·8 claims
- 2062US10468273B2Substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Nov 5, 2019·0 cites·5 claims
- 2162US9165798B2Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2012·Granted Oct 20, 2015·1 cites·14 claims
- 2262US4566359AMethod of stacking fins of heat exchangersHITACHI LTD·Filed 1984·Granted Jan 28, 1986·19 cites·4 claims
- 2356US4593756AFin-and-tube type heat exchangerHITACHI LTD·Filed 1985·Granted Jun 10, 1986·19 cites·2 claims
- 2452US9997378B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Jun 12, 2018·0 cites·6 claims
- 2551US2024266168A1Method of manufacturing group iii-nitride semiconductorSCREEN HOLDINGS CO LTD·Filed 2022·Application pending·0 cites
- 2651US2007080057A1Plating apparatus, plating cup and cathode ringDAINIPPON SCREEN MFG·Filed 2006·Application pending·0 cites
- 2751US2007023277A1Plating apparatus, plating cup and cathode ringDAINIPPON SCREEN MFG·Filed 2006·Application pending·0 cites
- 2849US2013260574A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2013·Application pending·0 cites
- 2947US4142392AInternally groove forming apparatus for heat exchanging pipesHITACHI LTD·Filed 1977·Granted Mar 6, 1979·5 cites·3 claims
- 3046US4898232AHeat exchanger and process for producing the sameHITACHI LTD·Filed 1988·Granted Feb 6, 1990·10 cites·10 claims
- 3145US2008178917A1Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2008·Application pending·0 cites
- 3245US2008173327A1Two-fluid nozzle, substrate processing apparatus, and substrate processing methodMIYAGI MASAHIRO·Filed 2007·Application pending·0 cites
- 3344US9972515B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2013·Granted May 15, 2018·0 cites·21 claims
- 3444US2007218656A1Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2007·Application pending·0 cites
- 3544US2007272545A1Apparatus for processing substrate and method of processing substrateMIYAGI MASAHIRO·Filed 2007·Application pending·0 cites
- 3644US2008006302A1Substrate treatment method and substrate treatment apparatusARAKI HIROYUKI·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →