Inventor · disambiguated record
Masaki Narushima
Also filed as: NARUSHIMA MASAKI
16 granted patents·13 pending applications·1,481 citations·filing 1988–2025
95Inventor score
Top patents by PatentIndex Score
29 records- 0198US6951587B1Ceramic heater system and substrate processing apparatus having the same installed thereinTOKYO ELECTRON LTD·Filed 2000·Granted Oct 4, 2005·600 cites·36 claims
- 0297US7198448B2Vacuum process systemTOKYO ELECTRON LTD·Filed 2006·Granted Apr 3, 2007·52 cites·9 claims
- 0393US5474410AMulti-chamber system provided with carrier unitsTEL VARIAN LIMITED·Filed 1994·Granted Dec 12, 1995·478 cites·10 claims
- 0491US7090741B2Semiconductor processing systemTOKYO ELECTRON LTD·Filed 2002·Granted Aug 15, 2006·59 cites·20 claims
- 0589US5332442ASurface processing apparatusTOKYO ELECTRON LTD·Filed 1992·Granted Jul 26, 1994·139 cites·14 claims
- 0687US7025554B2Vacuum process systemTOKYO ELECTRON LTD·Filed 2003·Granted Apr 11, 2006·32 cites·23 claims
- 0786US6802934B2Processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Oct 12, 2004·33 cites·10 claims
- 0877US8940638B2Substrate wiring method and semiconductor manufacturing deviceHOSHINO SATOHIKO·Filed 2011·Granted Jan 27, 2015·5 cites·12 claims
- 0967US9209010B2Substrate cleaning method and substrate cleaning deviceMATSUI HIDEFUMI·Filed 2011·Granted Dec 8, 2015·2 cites·24 claims
- 1060US4955590APlate-like member receiving apparatusTOKYO ELECTRON LTD·Filed 1988·Granted Sep 11, 1990·26 cites·5 claims
- 1156US5065495AMethod for holding a plate-like memberTOKYO ELECTRON LTD·Filed 1990·Granted Nov 19, 1991·27 cites·2 claims
- 1254US7393172B1Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer deviceTOKYO ELECTRON LTD·Filed 2000·Granted Jul 1, 2008·5 cites·6 claims
- 1353US6702865B1Alignment processing mechanism and semiconductor processing device using itTOKYO ELECTRON LTD·Filed 1999·Granted Mar 9, 2004·19 cites·17 claims
- 1451US2014083976A1Cluster beam generating apparatus, substrate processing apparatus, cluster beam generating method, and substrate processing methodTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1549US2025179630A1Substrate Treatment Device, Fluid Activation Device, Substrate Treatment Method, and Fluid Activation MethodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1646US2010099254A1Semiconductor manufacturing apparatus, semiconductor device manufacturing method, storage medium and computer programTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1746US2012125889A1Cluster beam generating apparatus, substrate processing apparatus, cluster beam generating method, and substrate processing methodTOYODA NORIAKI·Filed 2011·Application pending·0 cites
- 1845US2009325393A1Heat treatment method and heat treatment apparatusTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1941US8168946B2Charged particle separation apparatus and charged particle bombardment apparatusNARUSHIMA MASAKI·Filed 2010·Granted May 1, 2012·0 cites·7 claims
- 2040US8635655B2Input switching apparatus and input switching method of audio/video signal, and audio/video systemNARUSHIMA MASAKI·Filed 2012·Granted Jan 21, 2014·0 cites·14 claims
- 2140US2014134852A1Method and apparatus for forming dielectric film of low-dielectric constant and method for detaching porogenTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 2240US2002020355A1Processing apparatusFiled 2001·Application pending·0 cites
- 2339US2006084266A1Film formation methodEIICHI KONDOH·Filed 2005·Application pending·0 cites
- 2438US2010319545A1Charged particle separation apparatus and charged particle bombardment apparatusTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 2537US2013295751A1Thin film forming device for solar cell and thin film forming methodKATO TAKAMASA·Filed 2012·Application pending·0 cites
- 2636US2012128892A1Surface processing method and surface processing apparatusTOYODA NORIAKI·Filed 2011·Application pending·0 cites
- 2735US2006099348A1Deposition methodEIICHI KONDOH·Filed 2005·Application pending·0 cites
- 2834US2013056024A1Substrate cleaning method and semiconductor manufacturing apparatusHOSHINO SATOHIKO·Filed 2011·Application pending·0 cites
- 2932US4941800ATransfer apparatus for plate-like memberTOKYO ELECTRON LTD·Filed 1988·Granted Jul 17, 1990·4 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →