Inventor · disambiguated record
Mari Nozoe
Also filed as: MACHIDA KAZUHISA · NOZOE MARI · USAMI YASUTSUGU
73 granted patents·8 pending applications·2,344 citations·filing 1997–2011
99Inventor score
Top patents by PatentIndex Score
81 records- 0199US6172363B1Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 1997·Granted Jan 9, 2001·185 cites·20 claims
- 0299US5986263AElectron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 1997·Granted Nov 16, 1999·164 cites·21 claims
- 0398US6583413B1Method of inspecting a circuit pattern and inspecting instrumentHITACHI LTD·Filed 2000·Granted Jun 24, 2003·123 cites·14 claims
- 0497US7211797B2Inspection method and inspection system using charged particle beamHITACHI HIGH TECH CORP·Filed 2005·Granted May 1, 2007·28 cites·15 claims
- 0597US6329826B1Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2000·Granted Dec 11, 2001·95 cites·4 claims
- 0696US7417444B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2005·Granted Aug 26, 2008·25 cites·7 claims
- 0796US6700122B2Wafer inspection system and wafer inspection process using charged particle beamHITACHI LTD·Filed 2002·Granted Mar 2, 2004·88 cites·12 claims
- 0896US6388747B2Inspection method, apparatus and system for circuit patternHITACHI LTD·Filed 2001·Granted May 14, 2002·62 cites·2 claims
- 0995US6838667B2Method and apparatus for charged particle beam microscopyHITACHI LTD·Filed 2001·Granted Jan 4, 2005·59 cites·17 claims
- 1095US6797954B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2003·Granted Sep 28, 2004·42 cites·7 claims
- 1195US6759655B2Inspection method, apparatus and system for circuit patternHITACHI LTD·Filed 2001·Granted Jul 6, 2004·74 cites·4 claims
- 1295US6421122B2Inspection method, apparatus and system for circuit patternHITACHI LTD·Filed 2001·Granted Jul 16, 2002·51 cites·5 claims
- 1394US6952492B2Method and apparatus for inspecting a semiconductor deviceHITACHI LTD·Filed 2001·Granted Oct 4, 2005·50 cites·18 claims
- 1494US6661507B2Pattern inspecting system and pattern inspecting methodHITACHI LTD·Filed 2002·Granted Dec 9, 2003·47 cites·8 claims
- 1593US6583634B1Method of inspecting circuit pattern and inspecting instrumentHITACHI LTD·Filed 2000·Granted Jun 24, 2003·68 cites·5 claims
- 1692US6172365B1Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 1999·Granted Jan 9, 2001·48 cites·10 claims
- 1791US7521679B2Inspection method and inspection system using charged particle beamHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 21, 2009·10 cites·12 claims
- 1891US6583414B2Method of inspecting pattern and inspecting instrumentHITACHI LTD·Filed 2000·Granted Jun 24, 2003·52 cites·17 claims
- 1991US6493082B2Inspection method, apparatus and system for circuit patternHITACHI LTD·Filed 2002·Granted Dec 10, 2002·35 cites·4 claims
- 2091US6373054B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2001·Granted Apr 16, 2002·23 cites·22 claims
- 2190US7952074B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2008·Granted May 31, 2011·8 cites·18 claims
- 2290US7397031B2Method of inspecting a circuit pattern and inspecting instrumentHITACHI LTD·Filed 2006·Granted Jul 8, 2008·10 cites·7 claims
- 2390US6979823B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2004·Granted Dec 27, 2005·21 cites·9 claims
- 2489US7394070B2Method and apparatus for inspecting patternsHITACHI HIGH TECH CORP·Filed 2005·Granted Jul 1, 2008·14 cites·14 claims
- 2589US6476913B1Inspection method, apparatus and system for circuit patternHITACHI LTD·Filed 1999·Granted Nov 5, 2002·59 cites·11 claims
- 2688US7116817B2Method and apparatus for inspecting a semiconductor deviceHITACHI LTD·Filed 2005·Granted Oct 3, 2006·10 cites·18 claims
- 2788US7019294B2Inspection method and apparatus using charged particle beamHITACHI HIGH TECH CORP·Filed 2004·Granted Mar 28, 2006·32 cites·15 claims
- 2888US6703850B2Method of inspecting circuit pattern and inspecting instrumentHITACHI LTD·Filed 2003·Granted Mar 9, 2004·37 cites·6 claims
- 2988US6586952B2Method of inspecting pattern and inspecting instrumentFiled 2001·Granted Jul 1, 2003·28 cites·8 claims
- 3088US6480279B2Inspection method, apparatus and system for circuit patternHITACHI LTD·Filed 2001·Granted Nov 12, 2002·23 cites·2 claims
- 3187US7242015B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2005·Granted Jul 10, 2007·6 cites·21 claims
- 3287US7098455B2Method of inspecting a circuit pattern and inspecting instrumentHITACHI LTD·Filed 2003·Granted Aug 29, 2006·26 cites·5 claims
- 3387US6919564B2Inspection method, apparatus and system for circuit patternHITACHI LTD·Filed 2002·Granted Jul 19, 2005·23 cites·1 claims
- 3487US6717142B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2002·Granted Apr 6, 2004·16 cites·15 claims
- 3587US6542830B1Process control systemHITACHI LTD·Filed 1997·Granted Apr 1, 2003·93 cites·25 claims
- 3686US7526747B2Inspection method and inspection system using charged particle beamHITACHI LTD·Filed 2005·Granted Apr 28, 2009·7 cites·9 claims
- 3786US6898305B2Circuit pattern inspection method and apparatusHITACHI LTD·Filed 2001·Granted May 24, 2005·40 cites·24 claims
- 3886US6087673AMethod of inspecting pattern and apparatus thereofHITACHI LTD·Filed 1998·Granted Jul 11, 2000·58 cites·29 claims
- 3985US8558173B2Method of inspecting pattern and inspecting instrumentNOZOE MARI·Filed 2006·Granted Oct 15, 2013·7 cites·6 claims
- 4085US7218126B2Inspection method and apparatus for circuit patternHITACHI HIGH TECH CORP·Filed 2005·Granted May 15, 2007·7 cites·10 claims
- 4185US7116816B2Method of inspecting a pattern and an apparatus thereof and a method of processing a specimenHITACHI LTD·Filed 2001·Granted Oct 3, 2006·41 cites·23 claims
- 4285US6753524B2Inspection system and inspection process for wafer with circuit using charged-particle beamHITACHI LTD·Filed 2002·Granted Jun 22, 2004·23 cites·21 claims
- 4385US6559663B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2001·Granted May 6, 2003·20 cites·10 claims
- 4484US7026830B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2003·Granted Apr 11, 2006·19 cites·6 claims
- 4584US6476390B1Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beamsHITACHI LTD·Filed 1998·Granted Nov 5, 2002·68 cites·16 claims
- 4683US6828554B2Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the sameHITACHI LTD·Filed 2004·Granted Dec 7, 2004·11 cites·8 claims
- 4783US6757621B2Process management systemHITACHI LTD·Filed 2003·Granted Jun 29, 2004·35 cites·10 claims
- 4882US6903821B2Inspection method, apparatus and system for circuit patternHITACHI LTD·Filed 2002·Granted Jun 7, 2005·15 cites·6 claims
- 4981US6236057B1Method of inspecting pattern and apparatus thereof with a differential brightness image detectionHITACHI LTD·Filed 2000·Granted May 22, 2001·15 cites·23 claims
- 5080US7271385B2Inspection method and inspection apparatus using electron beamHITACHI HIGH TECH CORP·Filed 2005·Granted Sep 18, 2007·5 cites·5 claims
Showing the top 50 of 81 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →