Inventor · disambiguated record
Mary Anne Plano
Also filed as: PLANO MARY ANNE
4 granted patents·1 pending application·382 citations·filing 1999–2018
81Inventor score
Top patents by PatentIndex Score
5 records- 0197US6844258B1Selective refractory metal and nitride cappingNOVELLUS SYSTEMS INC·Filed 2003·Granted Jan 18, 2005·260 cites·55 claims
- 0293US7157798B1Selective refractory metal and nitride cappingNOVELLUS SYSTEMS INC·Filed 2004·Granted Jan 2, 2007·68 cites·13 claims
- 0377US6265320B1Method of minimizing reactive ion etch damage of organic insulating layers in semiconductor fabricationNOVELLUS SYSTEMS INC·Filed 1999·Granted Jul 24, 2001·54 cites·20 claims
- 0457US10400323B2Ultra-low defect part processLAM RES CORP·Filed 2017·Granted Sep 3, 2019·0 cites·15 claims
- 0538US2018294197A1System design for in-line particle and contamination metrology for showerhead and electrode partsLAM RES CORP·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →