Inventor · disambiguated record
Martin Scales
Also filed as: SCALES MARTIN · SCALES MARTIN N
4 granted patents·190 citations·filing 1997–2001
81Inventor score
Top patents by PatentIndex Score
4 records- 0194US6413873B1System for chemical mechanical planarizationAPPLIED MATERIALS INC·Filed 2000·Granted Jul 2, 2002·85 cites·3 claims
- 0280US6126382AApparatus for aligning substrate to chuck in processing chamberNOVELLUS SYSTEMS INC·Filed 1997·Granted Oct 3, 2000·71 cites·27 claims
- 0376US6592439B1Platen for retaining polishing materialAPPLIED MATERIALS INC·Filed 2000·Granted Jul 15, 2003·22 cites·43 claims
- 0468US6520841B2Apparatus and methods for chemical mechanical polishing with an incrementally advanceable polishing sheetAPPLIED MATERIALS INC·Filed 2001·Granted Feb 18, 2003·12 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →