Inventor · disambiguated record
Masaya Seki
Also filed as: SEKI MASAYA
53 granted patents·12 pending applications·197 citations·filing 2001–2025
98Inventor score
Top patents by PatentIndex Score
65 records- 0194US10343252B2Polishing apparatus for detecting abnormality in polishing of a substrateEBARA CORP·Filed 2017·Granted Jul 9, 2019·4 cites·14 claims
- 0291US11833551B2Pre-wet module, deaerated liquid circulation system, and pre-wet methodEBARA CORP·Filed 2022·Granted Dec 5, 2023·2 cites·14 claims
- 0391US8641480B2Polishing apparatus and polishing methodNAKANISHI MASAYUKI·Filed 2011·Granted Feb 4, 2014·10 cites·12 claims
- 0490US8979615B2Polishing apparatus and polishing methodSEKI MASAYA·Filed 2011·Granted Mar 17, 2015·8 cites·6 claims
- 0589US9248545B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2014·Granted Feb 2, 2016·7 cites·13 claims
- 0689US8187055B2Polishing apparatus and polishing methodTAKAHASHI TAMAMI·Filed 2008·Granted May 29, 2012·11 cites·18 claims
- 0788US10403505B2Substrate processing method and substrate processing apparatusEBARA CORP·Filed 2017·Granted Sep 3, 2019·5 cites·11 claims
- 0888US10137552B2Polishing apparatusEBARA CORP·Filed 2017·Granted Nov 27, 2018·2 cites·7 claims
- 0988US9782869B2Apparatus for detecting abnormality in polishing of a substrateEBARA CORP·Filed 2016·Granted Oct 10, 2017·2 cites·7 claims
- 1087US10155294B2Polishing apparatus and polishing methodEBARA CORP·Filed 2018·Granted Dec 18, 2018·2 cites·5 claims
- 1187US9694467B2Polishing method of polishing a substrateEBARA CORP·Filed 2016·Granted Jul 4, 2017·2 cites·5 claims
- 1286US9649739B2Polishing apparatusEBARA CORP·Filed 2015·Granted May 16, 2017·2 cites·12 claims
- 1386US8926402B2Method of polishing a substrate using a polishing tape having fixed abrasiveNAKANISHI MASAYUKI·Filed 2011·Granted Jan 6, 2015·6 cites·19 claims
- 1486US8047896B2Polishing apparatus, polishing method, and processing apparatusEBARA CORP·Filed 2007·Granted Nov 1, 2011·11 cites·12 claims
- 1585US8029333B2Device for polishing peripheral edge of semiconductor waferEBARA CORP·Filed 2006·Granted Oct 4, 2011·11 cites·28 claims
- 1684US9914196B2Polishing apparatus and polishing methodEBARA CORP·Filed 2015·Granted Mar 13, 2018·2 cites·5 claims
- 1784US8748289B2Method for manufacturing semiconductor deviceEBARA CORP·Filed 2013·Granted Jun 10, 2014·5 cites·4 claims
- 1883US9248543B2Method of detecting abnormality in polishing of a substrate and polishing apparatusEBARA CORP·Filed 2013·Granted Feb 2, 2016·3 cites·21 claims
- 1982US10144103B2Polishing apparatus and polishing methodEBARA CORP·Filed 2015·Granted Dec 4, 2018·3 cites·16 claims
- 2082US9561573B2Polishing apparatusEBARA CORP·Filed 2014·Granted Feb 7, 2017·3 cites·12 claims
- 2182US9457447B2Polishing apparatus and polishing methodSEKI MASAYA·Filed 2011·Granted Oct 4, 2016·5 cites·18 claims
- 2282US9287158B2Substrate processing apparatusTAKAHASHI TAMAMI·Filed 2006·Granted Mar 15, 2016·7 cites·8 claims
- 2382US8445360B2Method for manufacturing semiconductor deviceNAKANISHI MASAYUKI·Filed 2011·Granted May 21, 2013·5 cites·6 claims
- 2482US7976361B2Polishing apparatus and polishing methodEBARA CORP·Filed 2008·Granted Jul 12, 2011·8 cites·13 claims
- 2581US10414013B2Polishing method and polishing apparatusEBARA CORP·Filed 2018·Granted Sep 17, 2019·2 cites·13 claims
- 2681US10166647B2Polishing apparatus and polishing methodEBARA CORP·Filed 2016·Granted Jan 1, 2019·2 cites·14 claims
- 2779US9199352B2Polishing apparatus, polishing method and pressing member for pressing a polishing toolSEKI MASAYA·Filed 2011·Granted Dec 1, 2015·4 cites·31 claims
- 2879US8506363B2Substrate holder and substrate holding methodTAKAHASHI TAMAMI·Filed 2009·Granted Aug 13, 2013·6 cites·10 claims
- 2978US12270120B2Plating apparatus and plating methodEBARA CORP·Filed 2021·Granted Apr 8, 2025·0 cites·18 claims
- 3078US9457448B2Polishing apparatus and polishing methodEBARA CORP·Filed 2015·Granted Oct 4, 2016·2 cites·12 claims
- 3178US8535117B2Method and apparatus for polishing a substrate having a grinded back surfaceNAKANISHI MASAYUKI·Filed 2010·Granted Sep 17, 2013·5 cites·11 claims
- 3277US9517544B2Polishing apparatus and polishing methodEBARA CORP·Filed 2014·Granted Dec 13, 2016·2 cites·10 claims
- 3375US8986069B2Polishing apparatus and polishing methodTAKAHASHI TAMAMI·Filed 2012·Granted Mar 24, 2015·2 cites·7 claims
- 3472US6824613B2Substrate processing apparatusEBARA CORP·Filed 2002·Granted Nov 30, 2004·16 cites·11 claims
- 3571US12076760B2Pre-wet module, deaerated liquid circulation system, and pre-wet methodEBARA CORP·Filed 2023·Granted Sep 3, 2024·0 cites·4 claims
- 3671US2025207290A1Plating apparatus and plating methodEBARA CORP·Filed 2025·Application pending·0 cites
- 3769US7578886B2Substrate processing apparatus, substrate processing method, and substrate holding apparatusEBARA CORP·Filed 2004·Granted Aug 25, 2009·14 cites·35 claims
- 3868US11230789B2Method of removing liquid from seal of a substrate holderEBARA CORP·Filed 2019·Granted Jan 25, 2022·0 cites·8 claims
- 3967US11511386B2Polishing apparatus and polishing methodEBARA CORP·Filed 2019·Granted Nov 29, 2022·0 cites·13 claims
- 4067US8393935B2Polishing apparatusKIMURA NORIO·Filed 2008·Granted Mar 12, 2013·3 cites·6 claims
- 4164US2025188641A1Plating apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 4263US6719300B2Metal gasketNICHIAS CORP·Filed 2001·Granted Apr 13, 2004·11 cites·4 claims
- 4362US12359339B2Plating apparatus and substrate holder operation methodEBARA CORP·Filed 2020·Granted Jul 15, 2025·0 cites·16 claims
- 4461US9138854B2Polishing apparatusMAEDA KAZUAKI·Filed 2009·Granted Sep 22, 2015·2 cites·7 claims
- 4561US2024247396A1Leakage determination method and plating apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 4660US12247311B2Plating apparatus and plating process methodEBARA CORP·Filed 2020·Granted Mar 11, 2025·0 cites·11 claims
- 4760US11846035B2Plating apparatus and plating methodEBARA CORP·Filed 2022·Granted Dec 19, 2023·0 cites·3 claims
- 4859US12180606B2Plating apparatusEBARA CORP·Filed 2021·Granted Dec 31, 2024·0 cites·3 claims
- 4959US10493588B2Polishing apparatus and polishing methodEBARA CORP·Filed 2015·Granted Dec 3, 2019·0 cites·14 claims
- 5057US12152311B2Wetting method for substrate and plating apparatusEBARA CORP·Filed 2020·Granted Nov 26, 2024·0 cites·4 claims
Showing the top 50 of 65 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →