Inventor · disambiguated record
Mani Subramani
Also filed as: SUBRAMANI MANI
6 granted patents·2 pending applications·102 citations·filing 1996–2021
84Inventor score
Technology areasH01J
Top patents by PatentIndex Score
8 records- 0189US6368469B1Coils for generating a plasma and for sputteringAPPLIED MATERIALS INC·Filed 1997·Granted Apr 9, 2002·48 cites·54 claims
- 0288US11037764B2Modular microwave source with local Lorentz forceAPPLIED MATERIALS INC·Filed 2017·Granted Jun 15, 2021·4 cites·14 claims
- 0387US6783639B2Coils for generating a plasma and for sputteringAPPLIED MATERIALS INC·Filed 2002·Granted Aug 31, 2004·21 cites·32 claims
- 0485US8398832B2Coils for generating a plasma and for sputteringNULMAN JAIM·Filed 2005·Granted Mar 19, 2013·10 cites·25 claims
- 0571US11721532B2Modular microwave source with local lorentz forceAPPLIED MATERIALS INC·Filed 2021·Granted Aug 8, 2023·0 cites·10 claims
- 0666US6254737B1Active shield for generating a plasma for sputteringAPPLIED MATERIALS INC·Filed 1996·Granted Jul 3, 2001·19 cites·35 claims
- 0750US2013168232A1Coils for generating a plasma and for sputteringNULMAN JAIM·Filed 2013·Application pending·0 cites
- 0846US2004256217A1Coils for generating a plasma and for sputteringFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →