Inventor · disambiguated record
Masahide Tadokoro
Also filed as: TADOKORO MASAHIDE
26 granted patents·4 pending applications·511 citations·filing 2006–2025
94Inventor score
Top patents by PatentIndex Score
30 records- 0198US8927906B2Heating device, coating/developing system, heating method, coating/developing method, and recording medium having program for executing heating method or coating/developing methodTADOKORO MASAHIDE·Filed 2011·Granted Jan 6, 2015·469 cites·22 claims
- 0291US12123778B2Thermal imaging sensor for integration into track systemTOKYO ELECTRON LTD·Filed 2021·Granted Oct 22, 2024·2 cites·13 claims
- 0379US8242417B2Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plateTADOKORO MASAHIDE·Filed 2007·Granted Aug 14, 2012·6 cites·15 claims
- 0477US7957828B2Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Jun 7, 2011·6 cites·23 claims
- 0576US11062899B2Coated film removing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jul 13, 2021·3 cites·8 claims
- 0676US7968260B2Substrate processing method, computer-readable storage medium, and substrate processing systemTOKYO ELECTRON LTD·Filed 2009·Granted Jun 28, 2011·4 cites·9 claims
- 0775US2024355617A1Substrate processing apparatus, estimation method of substrate processing and recording mediumTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0872US7910863B2Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plateTOKYO ELECTRON LTD·Filed 2007·Granted Mar 22, 2011·4 cites·9 claims
- 0972US7902485B2Temperature setting method of thermal processing plate, temperature setting apparatus of thermal processing plate, program, and computer-readable recording medium recording program thereonTOKYO ELECTRON LTD·Filed 2006·Granted Mar 8, 2011·4 cites·14 claims
- 1070US8698052B2Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plateTADOKORO MASAHIDE·Filed 2012·Granted Apr 15, 2014·2 cites·20 claims
- 1168US12051587B2Substrate processing apparatus, estimation method of substrate processing and recording mediumTOKYO ELECTRON LTD·Filed 2021·Granted Jul 30, 2024·0 cites·7 claims
- 1268US8253077B2Substrate processing method, computer-readable storage medium and substrate processing systemOGATA KUNIE·Filed 2011·Granted Aug 28, 2012·2 cites·5 claims
- 1368US7985516B2Substrate processing method, computer-readable storage medium and substrate processing systemTOKYO ELECTRON LTD·Filed 2009·Granted Jul 26, 2011·2 cites·6 claims
- 1467US7643126B2Method of setting focus condition at time of exposure, apparatus for setting focus condition at time of exposure, program, and computer readable recording mediumTOKYO ELECTRON LTD·Filed 2006·Granted Jan 5, 2010·2 cites·17 claims
- 1566US2025146807A1Information processing apparatus, information processing method and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1662US12228390B2Information processing apparatus, information processing method and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2021·Granted Feb 18, 2025·0 cites·17 claims
- 1762US7420650B2Method of setting processing condition in photolithography process, apparatus for setting processing condition in photolithography process, program, and computer readable recording mediumTOKYO ELECTRON LTD·Filed 2006·Granted Sep 2, 2008·1 cites·14 claims
- 1860US2025124621A1Display device, recording medium, and display methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1959US8135487B2Temperature setting method and apparatus for a thermal processing plateJYOUSAKA MEGUMI·Filed 2008·Granted Mar 13, 2012·2 cites·11 claims
- 2056US12467742B2Film thickness analysis method, film thickness analysis device and storage mediumTOKYO ELECTRON LTD·Filed 2022·Granted Nov 11, 2025·0 cites·12 claims
- 2156US11637031B2Systems and methods for spin process video analysis during substrate processingTOKYO ELECTRON LTD·Filed 2020·Granted Apr 25, 2023·0 cites·19 claims
- 2256US7715952B2Temperature setting of thermal processing plate using zernike coefficientsTOKYO ELECTRON LTD·Filed 2007·Granted May 11, 2010·2 cites·17 claims
- 2354US11474028B2Systems and methods for monitoring one or more characteristics of a substrateTOKYO ELECTRON LTD·Filed 2020·Granted Oct 18, 2022·0 cites·25 claims
- 2453US11703459B2System and method to calibrate a plurality of wafer inspection system (WIS) modulesTOKYO ELECTRON LTD·Filed 2020·Granted Jul 18, 2023·0 cites·23 claims
- 2549US10649335B2Substrate processing apparatus, substrate processing method and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted May 12, 2020·0 cites·14 claims
- 2648US11809091B2Substrate processing apparatus and processing condition adjustment methodTOKYO ELECTRON LTD·Filed 2020·Granted Nov 7, 2023·0 cites·15 claims
- 2748US2022269177A1Sensor technology integration into coating trackTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 2847US8308381B2Substrate processing method, computer-readable storage medium, and substrate processing systemTADOKORO MASAHIDE·Filed 2011·Granted Nov 13, 2012·0 cites·8 claims
- 2945US7867674B2Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such programTOKYO ELECTRON LTD·Filed 2006·Granted Jan 11, 2011·0 cites·11 claims
- 3037US9899243B2Light irradiation apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Feb 20, 2018·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →