Inventor · disambiguated record
Mayur Trivedi
Also filed as: TRIVEDI MAYUR
4 granted patents·1 pending application·176 citations·filing 1999–2018
77Inventor score
Top patents by PatentIndex Score
5 records- 0194US6444568B1Method of forming a copper diffusion barrierNOVELLUS SYSTEMS INC·Filed 2000·Granted Sep 3, 2002·126 cites·23 claims
- 0278US6593653B2Low leakage current silicon carbonitride prepared using methane, ammonia and silane for copper diffusion barrier, etchstop and passivation applicationsNOVELLUS SYSTEMS INC·Filed 1999·Granted Jul 15, 2003·48 cites·16 claims
- 0366US9431267B2Semiconductor device processing tools and methods for patterning substratesAPPLIED MATERIALS INC·Filed 2013·Granted Aug 30, 2016·2 cites·21 claims
- 0462US2018135180A1Apparatus for depositing a cobalt layer using a carousel batch deposition reactorAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 0559US9869024B2Methods and apparatus for depositing a cobalt layer using a carousel batch deposition reactorAPPLIED MATERIALS INC·Filed 2015·Granted Jan 16, 2018·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →