Inventor · disambiguated record
Manus Wong
Also filed as: WONG MANUS · WONG MANUS K
9 granted patents·1 pending application·1,299 citations·filing 1993–2020
92Inventor score
Top patents by PatentIndex Score
10 records- 0198US6083344AMulti-zone RF inductively coupled source configurationAPPLIED MATERIALS INC·Filed 1997·Granted Jul 4, 2000·346 cites·18 claims
- 0297US6170428B1Symmetric tunable inductively coupled HDP-CVD reactorAPPLIED MATERIALS INC·Filed 1996·Granted Jan 9, 2001·430 cites·26 claims
- 0395US5761023ASubstrate support with pressure zones having reduced contact area and temperature feedbackAPPLIED MATERIALS INC·Filed 1996·Granted Jun 2, 1998·218 cites·43 claims
- 0489US5891253ACorrosion resistant apparatusAPPLIED MATERIALS INC·Filed 1995·Granted Apr 6, 1999·69 cites·28 claims
- 0589US5522932ACorrosion-resistant apparatusAPPLIED MATERIALS INC·Filed 1993·Granted Jun 4, 1996·58 cites·31 claims
- 0688US5593541AMethod of manufacturing using corrosion-resistant apparatus comprising rhodiumAPPLIED MATERIALS INC·Filed 1995·Granted Jan 14, 1997·57 cites·19 claims
- 0776US5522937AWelded susceptor assemblyAPPLIED MATERIALS INC·Filed 1994·Granted Jun 4, 1996·58 cites·40 claims
- 0875US5332443ALift fingers for substrate processing apparatusAPPLIED MATERIALS INC·Filed 1993·Granted Jul 26, 1994·62 cites·20 claims
- 0966US11626314B2Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is locatedADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Apr 11, 2023·1 cites·10 claims
- 1044US2021118716A1Electrostatic chuck, method of manufacturing electrostatic chuck, and plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →