Inventor · disambiguated record
Manchao Xiao
Also filed as: XIAO MANCHAO
102 granted patents·38 pending applications·3,132 citations·filing 2001–2025
99Inventor score
Top patents by PatentIndex Score
140 records- 0199US6846515B2Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constantsAIR PROD & CHEM·Filed 2002·Granted Jan 25, 2005·667 cites·99 claims
- 0298US10468244B2Precursors and flowable CVD methods for making low-K films to fill surface featuresVERSUM MAT US LLC·Filed 2017·Granted Nov 5, 2019·388 cites·9 claims
- 0398US8993072B2Halogenated organoaminosilane precursors and methods for depositing films comprising sameAIR PROD & CHEM·Filed 2012·Granted Mar 31, 2015·285 cites·36 claims
- 0498US8771807B2Organoaminosilane precursors and methods for making and using sameXIAO MANCHAO·Filed 2012·Granted Jul 8, 2014·453 cites·10 claims
- 0598US7122222B2Precursors for depositing silicon containing films and processes thereofAIR PROD & CHEM·Filed 2003·Granted Oct 17, 2006·634 cites·19 claims
- 0697US9243324B2Methods of forming non-oxygen containing silicon-based filmsAIR PROD & CHEM·Filed 2013·Granted Jan 26, 2016·17 cites·22 claims
- 0796US8940648B2Process for producing silicon and oxide films from organoaminosilane precursorsAIR PROD & CHEM·Filed 2013·Granted Jan 27, 2015·28 cites·14 claims
- 0896US8912353B2Organoaminosilane precursors and methods for depositing films comprising sameXIAO MANCHAO·Filed 2011·Granted Dec 16, 2014·22 cites·57 claims
- 0996US8298628B2Low temperature deposition of silicon-containing filmsYANG LIU·Filed 2009·Granted Oct 30, 2012·58 cites·4 claims
- 1096US7960205B2Tellurium precursors for GST films in an ALD or CVD processAIR PROD & CHEM·Filed 2008·Granted Jun 14, 2011·32 cites·17 claims
- 1196US7875312B2Process for producing silicon oxide films for organoaminosilane precursorsAIR PROD & CHEM·Filed 2006·Granted Jan 25, 2011·48 cites·24 claims
- 1296US7875556B2Precursors for CVD silicon carbo-nitride and silicon nitride filmsAIR PROD & CHEM·Filed 2005·Granted Jan 25, 2011·29 cites·24 claims
- 1395US10453675B2Organoaminosilane precursors and methods for depositing films comprising sameVERSUM MAT US LLC·Filed 2014·Granted Oct 22, 2019·17 cites·5 claims
- 1495US9337018B2Methods for depositing films with organoaminodisilane precursorsAIR PROD & CHEM·Filed 2013·Granted May 10, 2016·15 cites·45 claims
- 1595US9005719B2Organoaminosilane precursors and methods for making and using sameXIAO MANCHAO·Filed 2014·Granted Apr 14, 2015·12 cites·7 claims
- 1695US8530361B2Process for producing silicon and oxide films from organoaminosilane precursorsXIAO MANCHAO·Filed 2010·Granted Sep 10, 2013·20 cites·19 claims
- 1795US8460753B2Methods for depositing silicon dioxide or silicon oxide films using aminovinylsilanesXIAO MANCHAO·Filed 2010·Granted Jun 11, 2013·24 cites·16 claims
- 1894US10421766B2Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing filmsAIR PROD & CHEM·Filed 2016·Granted Sep 24, 2019·5 cites·13 claims
- 1994US8703624B2Dielectric films comprising silicon and methods for making sameYANG LIU·Filed 2010·Granted Apr 22, 2014·18 cites·10 claims
- 2094US8318252B2Antimony precursors for GST films in ALD/CVD processesXIAO MANCHAO·Filed 2009·Granted Nov 27, 2012·15 cites·12 claims
- 2193US10899500B2Alkoxysilylamine compounds and applications thereofVERSUM MAT US LLC·Filed 2019·Granted Jan 26, 2021·5 cites·12 claims
- 2293US9200167B2Alkoxyaminosilane compounds and applications thereofAIR PROD & CHEM·Filed 2013·Granted Dec 1, 2015·10 cites·16 claims
- 2393US8129555B2Precursors for depositing silicon-containing films and methods for making and using sameCHENG HANSONG·Filed 2008·Granted Mar 6, 2012·53 cites·21 claims
- 2493US7932413B2Precursors for CVD silicon carbo-nitride filmsAIR PROD & CHEM·Filed 2008·Granted Apr 26, 2011·14 cites·9 claims
- 2592US10145008B2Compositions and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2016·Granted Dec 4, 2018·8 cites·20 claims
- 2691US9758534B2Organoaminosilanes and methods for making sameAIR PROD & CHEM·Filed 2015·Granted Sep 12, 2017·4 cites·8 claims
- 2791US9233990B2Organoaminosilanes and methods for making sameAIR PROD & CHEM·Filed 2015·Granted Jan 12, 2016·4 cites·1 claims
- 2890US11952465B2Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2020·Granted Apr 9, 2024·1 cites·5 claims
- 2990US10822458B2Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2018·Granted Nov 3, 2020·2 cites·7 claims
- 3090US9460912B2High temperature atomic layer deposition of silicon oxide thin filmsAIR PROD & CHEM·Filed 2013·Granted Oct 4, 2016·9 cites·13 claims
- 3190US9214630B2Method of making a multicomponent filmAIR PROD & CHEM·Filed 2014·Granted Dec 15, 2015·6 cites·20 claims
- 3290US7678422B2Cyclic chemical vapor deposition of metal-silicon containing filmsAIR PROD & CHEM·Filed 2007·Granted Mar 16, 2010·12 cites·12 claims
- 3389US10316407B2Compositions and methods using same for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2015·Granted Jun 11, 2019·4 cites·11 claims
- 3489US7288145B2Precursors for depositing silicon containing filmsAIR PROD & CHEM·Filed 2006·Granted Oct 30, 2007·13 cites·19 claims
- 3589US2025304804A1Compositions and processes for depositing carbon-doped silicon-containing filmsVERSUM MAT US LLC·Filed 2025·Application pending·0 cites
- 3688US10242864B2High temperature atomic layer deposition of silicon oxide thin filmsAIR PROD & CHEM·Filed 2016·Granted Mar 26, 2019·4 cites·8 claims
- 3787US9502234B2Methods to prepare silicon-containing filmsAIR PROD & CHEM·Filed 2014·Granted Nov 22, 2016·6 cites·20 claims
- 3887US8590705B2Cylinder surface treated container for monochlorosilaneBEHM PHILIP E·Filed 2011·Granted Nov 26, 2013·10 cites·15 claims
- 3986US11139162B2Organoaminosilane precursors and methods for depositing films comprising sameVERSUM MAT US LLC·Filed 2019·Granted Oct 5, 2021·2 cites·15 claims
- 4085US11584854B2Compositions and methods for the deposition of silicon oxide filmsVERSUM MAT US LLC·Filed 2020·Granted Feb 21, 2023·1 cites·17 claims
- 4185US9796739B2AZA-polysilane precursors and methods for depositing films comprising sameAIR PROD & CHEM·Filed 2014·Granted Oct 24, 2017·6 cites·21 claims
- 4285US8765223B2Binary and ternary metal chalcogenide materials and method of making and using sameXIAO MANCHAO·Filed 2009·Granted Jul 1, 2014·6 cites·24 claims
- 4385US8507040B2Binary and ternary metal chalcogenide materials and method of making and using sameXIAO MANCHAO·Filed 2011·Granted Aug 13, 2013·3 cites·20 claims
- 4485US8193027B2Method of making a multicomponent filmXIAO MANCHAO·Filed 2011·Granted Jun 5, 2012·6 cites·10 claims
- 4585US7384471B2Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constantsAIR PROD & CHEM·Filed 2003·Granted Jun 10, 2008·28 cites·35 claims
- 4684US11098069B2Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2019·Granted Aug 24, 2021·2 cites·8 claims
- 4784US10703915B2Compositions and methods for the deposition of silicon oxide filmsVERSUM MAT US LLC·Filed 2017·Granted Jul 7, 2020·1 cites·26 claims
- 4884US9640386B2Precursors for CVD silicon carbo-nitride filmsAIR PROD & CHEM·Filed 2014·Granted May 2, 2017·3 cites·18 claims
- 4984US7943195B2Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constantsAIR PROD & CHEM·Filed 2008·Granted May 17, 2011·8 cites·20 claims
- 5084US2023348736A1Compositions and processes for depositing carbon-doped silicon-containing filmsVERSUM MAT US LLC·Filed 2023·Application pending·0 cites
Showing the top 50 of 140 patent records by PatentIndex Score.
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