Inventor · disambiguated record
Mehmet Ali Akbas
Also filed as: AKBAS MEHMET A · AKBAS MEHMET ALI
7 granted patents·4 pending applications·7 citations·filing 2009–2025
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
11 records- 0180US10719019B2Substrate holder and a method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2017·Granted Jul 21, 2020·4 cites·20 claims
- 0276US12111581B2Method to manufacture nano ridges in hard ceramic coatingsASML HOLDING NV·Filed 2019·Granted Oct 8, 2024·2 cites·18 claims
- 0375US2025278029A1Substrate holder for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 0469US12321104B2Substrate holder for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Jun 3, 2025·0 cites·20 claims
- 0567US11270906B2Burls with altered surface topography for holding an object in lithography applicationsASML HOLDING NV·Filed 2018·Granted Mar 8, 2022·1 cites·19 claims
- 0655US11887881B2Lithographic apparatus, substrate table, and non-uniform coating methodASML HOLDING NV·Filed 2020·Granted Jan 30, 2024·0 cites·20 claims
- 0755US11448976B2Substrate holder for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Sep 20, 2022·0 cites·20 claims
- 0850US12189310B2Systems and methods for manufacturing a double-sided electrostatic clampASML HOLDING NV·Filed 2020·Granted Jan 7, 2025·0 cites·20 claims
- 0946US2023031443A1Wafer clamp hard burl production and refurbishmentASML HOLDING NV·Filed 2020·Application pending·0 cites
- 1043US2011221145A1Electrostatic chuckAKBAS MEHMET A·Filed 2009·Application pending·0 cites
- 1136US2022134480A1Laser roughening: engineering the roughness of the burl topASML HOLDING NV·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →