Inventor · disambiguated record
Meenakshisundaram Gandhi
Also filed as: GANDHI MEENAKSHISUNDARAM
4 granted patents·45 citations·filing 2006–2012
76Inventor score
Top patents by PatentIndex Score
4 records- 0192US9005877B2Method of forming patterns using block copolymers and articles thereofRATHSACK BENJAMEN M·Filed 2012·Granted Apr 14, 2015·11 cites·15 claims
- 0291US8012859B1Atomic layer deposition of silicon and silicon-containing filmsTOKYO ELECTRON LTD·Filed 2010·Granted Sep 6, 2011·19 cites·26 claims
- 0382US7964441B2Catalyst-assisted atomic layer deposition of silicon-containing films with integrated in-situ reactive treatmentTOKYO ELECTRON LTD·Filed 2007·Granted Jun 21, 2011·6 cites·7 claims
- 0480US7632354B2Thermal processing system with improved process gas flow and method for injecting a process gas into a thermal processing systemTOKYO ELECTRON LTD·Filed 2006·Granted Dec 15, 2009·9 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →