Inventor · disambiguated record
Mehran Naser-Ghodsi
Also filed as: NASER-GHODSI MEHRAN
4 granted patents·62 citations·filing 2003–2007
76Inventor score
Top patents by PatentIndex Score
4 records- 0187US6843927B2Method and apparatus for endpoint detection in electron beam assisted etchingKLA TENCOR TECH CORP·Filed 2003·Granted Jan 18, 2005·42 cites·35 claims
- 0283US7879730B2Etch selectivity enhancement in electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted Feb 1, 2011·11 cites·19 claims
- 0380US7709792B2Three-dimensional imaging using electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted May 4, 2010·7 cites·21 claims
- 0462US8052885B2Structural modification using electron beam activated chemical etchKLA TENCOR CORP·Filed 2007·Granted Nov 8, 2011·2 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →