Inventor · disambiguated record
Mikhail Baklanov
Also filed as: BAKLANOV MIKHAIL · BAKLANOV MIKHAIL RODIONOVICH · BAKLANOV MIKHAÏL
27 granted patents·5 pending applications·326 citations·filing 1996–2018
96Inventor score
Top patents by PatentIndex Score
32 records- 0196US9414445B2Method and apparatus for microwave treatment of dielectric filmsAPPLIED MATERIALS INC·Filed 2014·Granted Aug 9, 2016·21 cites·20 claims
- 0293US8961803B1Protection of porous substrates before treatmentIMEC VZW·Filed 2014·Granted Feb 24, 2015·16 cites·18 claims
- 0392US8540890B2Protective treatment for porous materialsIMEC·Filed 2012·Granted Sep 24, 2013·11 cites·22 claims
- 0489US9859102B2Method of etching porous filmTOKYO ELECTRON LTD·Filed 2016·Granted Jan 2, 2018·5 cites·11 claims
- 0586US6662631B2Method and apparatus for characterization of porous filmsIMEC INTER UNI MICRO ELECTR·Filed 2002·Granted Dec 16, 2003·34 cites·10 claims
- 0685US6593251B2Method to produce a porous oxygen-silicon layerIMEC INTER UNI MICRO ELECTR·Filed 2001·Granted Jul 15, 2003·29 cites·16 claims
- 0780US6635964B2Metallization structure on a fluorine-containing dielectric and a method for fabrication thereofIMEC INTER UNI MICRO ELECTR·Filed 2001·Granted Oct 21, 2003·25 cites·21 claims
- 0878US9117666B2Method for activating a porous layer surfaceIMEC VZW·Filed 2014·Granted Aug 25, 2015·5 cites·11 claims
- 0978US6435008B2Apparatus and method for determining porosityINTERUNIVERSITAIR MICROELECKTR·Filed 2001·Granted Aug 20, 2002·21 cites·4 claims
- 1077US7458251B2Method for determining solvent permeability of filmsIMEC INTER UNI MICRO ELECTR·Filed 2006·Granted Dec 2, 2008·6 cites·11 claims
- 1175US6255227B1Etching process of CoSi2 layersIMEC INTER UNI MICRO ELECTR·Filed 2000·Granted Jul 3, 2001·17 cites·10 claims
- 1274US7964039B2Cleaning of plasma chamber walls using noble gas cleaning stepIMEC·Filed 2008·Granted Jun 21, 2011·3 cites·9 claims
- 1373US9941151B2Method for producing an integrated circuit including a metallization layer comprising low K dielectric materialIMEC VZW·Filed 2017·Granted Apr 10, 2018·2 cites·17 claims
- 1471US8968864B2Sealed porous materials, methods for making them, and semiconductor devices comprising themIMEC·Filed 2012·Granted Mar 3, 2015·4 cites·19 claims
- 1570US6153484AEtching process of CoSi2 layersIMEC VZW·Filed 1996·Granted Nov 28, 2000·36 cites·5 claims
- 1664US6245489B1Fluorinated hard mask for micropatterning of polymersIMEC VZW·Filed 1998·Granted Jun 12, 2001·26 cites·12 claims
- 1763US6323555B1Metallization structure on a fluorine-containing dielectric and a method for fabrication thereofINTERUNIVERSITIAR MICROELEKTRO·Filed 1999·Granted Nov 27, 2001·27 cites·11 claims
- 1862US7042091B2Fluorinated hard mask for micropatterning of polymersIMEC VZW·Filed 2001·Granted May 9, 2006·7 cites·5 claims
- 1961US6900140B2Anisotropic etching of organic-containing insulating layersIMEC INTER UNI MICRO ELECTR·Filed 2004·Granted May 31, 2005·6 cites·8 claims
- 2055US8158523B2Quantification of hydrophobic and hydrophilic properties of materialsURBANOWICZ ADAM MICHAL·Filed 2008·Granted Apr 17, 2012·1 cites·23 claims
- 2154US10236162B2Method of etching porous filmTOKYO ELECTRON LTD·Filed 2017·Granted Mar 19, 2019·0 cites·4 claims
- 2250US6319736B1Apparatus and method for determining porosityIMEC INTER UNI MICRO ELECTR·Filed 1999·Granted Nov 20, 2001·13 cites·14 claims
- 2349US8974870B2Fabrication of porogen residues free low-k materials with improved mechanical and chemical resistanceBAKLANOV MIKHAIL·Filed 2011·Granted Mar 10, 2015·1 cites·16 claims
- 2447US2019135998A1Method for Pore Sealing of Porous Materials Using Polyimide Langmuir-Blodgett FilmIMEC·Filed 2018·Application pending·0 cites
- 2546US6844267B1Anisotropic etching of organic-containing insulating layersIMEC INTER UNI MICRO ELECTR·Filed 1998·Granted Jan 18, 2005·10 cites·7 claims
- 2645US9595422B2Plasma etching of porous substratesIMEC VZW·Filed 2016·Granted Mar 14, 2017·0 cites·15 claims
- 2745US9492841B2Method for pore sealing of porous materials using polyimide langmuir-blodgett filmIMEC·Filed 2013·Granted Nov 15, 2016·0 cites·9 claims
- 2843US7415902B2Method for the quantification of hydrophilic properties of porous materialsIMEC INTER UNI MICRO ELECTR·Filed 2006·Granted Aug 26, 2008·0 cites·10 claims
- 2941US2017021604A1Method for Pore Sealing of Porous Materials Using Polyimide Langmuir-Blodgett FilmIMEC·Filed 2016·Application pending·0 cites
- 3041US2014291289A1Method for etching porous organosilica low-k materialsTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 3140US2003181066A1Method to produce a porous oxygen-silicon layerFiled 2003·Application pending·0 cites
- 3233US2011006406A1Fabrication of porogen residues free and mechanically robust low-k materialsIMEC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →