Inventor · disambiguated record
Michael Budach
Also filed as: BUDACH MICHAEL
27 granted patents·14 pending applications·54 citations·filing 2007–2025
94Inventor score
Files withZEISS CARL SMT GMBH31ZEISS CARL SMS GMBH3BUDACH MICHAEL2BIHR JOHANNES1Cart Zeiss SMT GmbH1
Top patents by PatentIndex Score
41 records- 0186US7645989B2Electron microscope for inspecting and processing of an object with miniaturized structures and method thereofZEISS CARL NTS GMBH·Filed 2007·Granted Jan 12, 2010·13 cites·19 claims
- 0285US8247782B2Apparatus and method for investigating and/or modifying a sampleEDINGER KLAUS·Filed 2010·Granted Aug 21, 2012·9 cites·20 claims
- 0384US10068747B2Methods and devices for examining an electrically charged specimen surfaceZEISS CARL SMT GMBH·Filed 2016·Granted Sep 4, 2018·4 cites·25 claims
- 0484US9336983B2Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscopeZEISS CARL SMT GMBH·Filed 2015·Granted May 10, 2016·8 cites·20 claims
- 0581US8674329B2Method and apparatus for analyzing and/or repairing of an EUV mask defectBUDACH MICHAEL·Filed 2011·Granted Mar 18, 2014·4 cites·10 claims
- 0680US12292680B2Method and apparatuses for disposing of excess material of a photolithographic maskZEISS CARL SMT GMBH·Filed 2022·Granted May 6, 2025·0 cites·17 claims
- 0779US12164226B2Method and apparatuses for disposing of excess material of a photolithographic maskZEISS CARL SMT GMBH·Filed 2022·Granted Dec 10, 2024·0 cites·41 claims
- 0879US10060947B2Method and apparatus for analyzing and for removing a defect of an EUV photomaskZEISS CARL SMT GMBH·Filed 2013·Granted Aug 28, 2018·3 cites·25 claims
- 0976US11592461B2Apparatus and method for examining and/or processing a sampleZEISS CARL SMT GMBH·Filed 2022·Granted Feb 28, 2023·0 cites·20 claims
- 1075US10983075B2Device and method for analysing a defect of a photolithographic mask or of a waferZEISS CARL SMT GMBH·Filed 2017·Granted Apr 20, 2021·1 cites·11 claims
- 1174US11650495B2Apparatus and method for determining a position of an element on a photolithographic maskZEISS CARL SMT GMBH·Filed 2022·Granted May 16, 2023·0 cites·20 claims
- 1273US11256168B2Apparatus and method for repairing a photolithographic maskZEISS CARL SMT GMBH·Filed 2020·Granted Feb 22, 2022·1 cites·16 claims
- 1373US9910065B2Apparatus and method for examining a surface of a maskZEISS CARL SMT GMBH·Filed 2016·Granted Mar 6, 2018·2 cites·39 claims
- 1473US8316698B2Determining a repairing form of a defect at or close to an edge of a substrate of a photo maskBUDACH MICHAEL·Filed 2009·Granted Nov 27, 2012·3 cites·18 claims
- 1572US9115981B2Apparatus and method for investigating an objectZEISS CARL SMS GMBH·Filed 2013·Granted Aug 25, 2015·3 cites·25 claims
- 1670US11733186B2Device and method for analyzing a defect of a photolithographic mask or of a waferZEISS CARL SMT GMBH·Filed 2021·Granted Aug 22, 2023·0 cites·32 claims
- 1769US11874598B2Method and apparatuses for disposing of excess material of a photolithographic maskZEISS CARL SMT GMBH·Filed 2019·Granted Jan 16, 2024·0 cites·15 claims
- 1869US2025138413A1Method for processing a defect of a microlithographic photomaskZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 1969US2025147412A1Method for examining a blank of a microlithographic photomaskZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 2069US2025391632A1Creating an electric field when processing a lithography objectZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 2167US11262378B2Apparatus and method for examining and/or processing a sampleZEISS CARL SMT GMBH·Filed 2020·Granted Mar 1, 2022·0 cites·12 claims
- 2267US2024310721A1Method and apparatus for calibrating an operation on a photomaskCart Zeiss SMT GmbH·Filed 2024·Application pending·0 cites
- 2366US9431212B2Method for determining the performance of a photolithographic maskWAIBLINGER MARKUS·Filed 2011·Granted Aug 30, 2016·2 cites·21 claims
- 2465US11385540B2Apparatus and method for determining a position of an element on a photolithographic maskZEISS CARL SMT GMBH·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 2563US2024310722A1Methods and apparatuses for processing a lithographic objectZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 2662US2025174429A1Method and device for correcting image errors when scanning a charged particle beam over a sampleZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 2759US2024219844A1Method and apparatus for determining optical properties of deposition materials used for lithographic masksZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 2858US11170970B2Methods and devices for examining an electrically charged specimen surfaceZEISS CARL SMT GMBH·Filed 2018·Granted Nov 9, 2021·0 cites·19 claims
- 2958US2024069434A1Method and apparatus for particle beam-induced processing of a defect of a microlithographic photomaskZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 3056US12493238B2Method, device and computer program for repairing a mask defectZEISS CARL SMT GMBH·Filed 2022·Granted Dec 9, 2025·0 cites·32 claims
- 3156US2023081844A1Method for particle beam-induced processing of a defect of a microlithographic photomaskZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 3255US12135540B2Devices and methods for examining and/or processing an element for photolithographyZEISS CARL SMT GMBH·Filed 2020·Granted Nov 5, 2024·0 cites·24 claims
- 3355US2018106831A1Method and apparatus for analyzing and for removing a defect of an euv photomaskZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
- 3455US2023238209A1Apparatus for analyzing and/or processing a sample with a particle beam and methodZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 3554US8058614B2Electron microscope for inspecting and processing of an object with miniaturized structures and method thereofBIHR JOHANNES·Filed 2010·Granted Nov 15, 2011·1 cites·14 claims
- 3652US11150552B2Method and apparatus for analyzing a defective location of a photolithographic maskZEISS CARL SMT GMBH·Filed 2019·Granted Oct 19, 2021·0 cites·24 claims
- 3751US2024085171A1Mesh Integrity CheckZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 3844US10410820B2Beam blanker and method for blanking a charged particle beamZEISS CARL SMT GMBH·Filed 2017·Granted Sep 10, 2019·0 cites·21 claims
- 3944US9863760B2Method and device for determining a reference point of an orientation marking on a substrate of a photolithographic mask in an automated mannerZEISS CARL SMT GMBH·Filed 2014·Granted Jan 9, 2018·0 cites·25 claims
- 4040US2014255831A1Method and apparatus for protecting a substrate during processing by a particle beamZEISS CARL SMS GMBH·Filed 2014·Application pending·0 cites
- 4138US2010297362A1Method for processing an object with miniaturized structuresZEISS CARL SMS GMBH·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →