Inventor · disambiguated record
Michael Graf
Also filed as: GRAF MICHAEL · GRAF MICHAEL A
34 granted patents·5 pending applications·778 citations·filing 1998–2019
97Inventor score
Files withAXCELIS TECH INC18TEL EPION INC4EBERHARD KARLS UNI TUBINGEN UN3TABAT MARTIN D3GRAF MICHAEL2
Top patents by PatentIndex Score
39 records- 0194US6101971AIon implantation control using charge collection, optical emission spectroscopy and mass analysisAXCELIS TECH INC·Filed 1998·Granted Aug 15, 2000·142 cites·7 claims
- 0290US8097860B2Multiple nozzle gas cluster ion beam processing system and method of operatingTABAT MARTIN D·Filed 2010·Granted Jan 17, 2012·13 cites·20 claims
- 0389US7589333B2Methods for rapidly switching off an ion beamAXCELIS TECH INC·Filed 2006·Granted Sep 15, 2009·12 cites·19 claims
- 0487US8691700B2Gas cluster ion beam etch profile control using beam divergenceHAUTALA JOHN J·Filed 2011·Granted Apr 8, 2014·8 cites·18 claims
- 0587US7750320B2System and method for two-dimensional beam scan across a workpiece of an ion implanterAXCELIS TECH INC·Filed 2006·Granted Jul 6, 2010·10 cites·20 claims
- 0686US6135128AMethod for in-process cleaning of an ion sourceEATON CORP·Filed 1998·Granted Oct 24, 2000·80 cites·10 claims
- 0785US6953942B1Ion beam utilization during scanned ion implantationAXCELIS TECH INC·Filed 2004·Granted Oct 11, 2005·32 cites·20 claims
- 0885US6476399B1System and method for removing contaminant particles relative to an ion beamAXCELIS TECH INC·Filed 2000·Granted Nov 5, 2002·23 cites·23 claims
- 0984US6608315B1Mechanism for prevention of neutron radiation in ion implanter beamlineFiled 2000·Granted Aug 19, 2003·21 cites·11 claims
- 1083US6992310B1Scanning systems and methods for providing ions from an ion beam to a workpieceAXCELIS TECH INC·Filed 2004·Granted Jan 31, 2006·18 cites·26 claims
- 1183US6534775B1Electrostatic trap for particles entrained in an ion beamAXCELIS TECH INC·Filed 2000·Granted Mar 18, 2003·30 cites·18 claims
- 1282US6828572B2Ion beam incident angle detector for ion implant systemsAXCELIS TECH INC·Filed 2003·Granted Dec 7, 2004·31 cites·42 claims
- 1381US6804560B2Retina implantEBERHARD KARLS UNI TUBINGEN UN·Filed 2001·Granted Oct 12, 2004·103 cites·31 claims
- 1480US8193513B2Hybrid ion source/multimode ion sourceDIVERGILIO WILLIAM F·Filed 2008·Granted Jun 5, 2012·8 cites·10 claims
- 1576US8089052B2Ion source with adjustable apertureTIEGER DANIEL·Filed 2009·Granted Jan 3, 2012·6 cites·20 claims
- 1675US8304033B2Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzlesTABAT MARTIN D·Filed 2009·Granted Nov 6, 2012·3 cites·45 claims
- 1775US8173980B2Gas cluster ion beam system with cleaning apparatusGRAF MICHAEL·Filed 2010·Granted May 8, 2012·4 cites·17 claims
- 1875US6847847B2Retina implant assembly and methods for manufacturing the sameEBERHARD KARLS UNI TUBINGEN UN·Filed 2001·Granted Jan 25, 2005·76 cites·49 claims
- 1974US7423277B2Ion beam monitoring in an ion implanter using an imaging deviceAXCELIS TECH INC·Filed 2006·Granted Sep 9, 2008·5 cites·27 claims
- 2073US7358508B2Ion implanter with contaminant collecting surfaceAXCELIS TECH INC·Filed 2005·Granted Apr 15, 2008·3 cites·15 claims
- 2171US8981322B2Multiple nozzle gas cluster ion beam systemTABAT MARTIN D·Filed 2009·Granted Mar 17, 2015·2 cites·58 claims
- 2266US9735019B2Process gas enhancement for beam treatment of a substrateTEL EPION INC·Filed 2015·Granted Aug 15, 2017·1 cites·20 claims
- 2366US7701230B2Method and system for ion beam profilingAXCELIS TECH INC·Filed 2007·Granted Apr 20, 2010·2 cites·14 claims
- 2466US7375355B2Ribbon beam ion implanter cluster toolAXCELIS TECH INC·Filed 2006·Granted May 20, 2008·2 cites·20 claims
- 2565US7598495B2Methods and systems for trapping ion beam particles and focusing an ion beamAXCELIS TECH INC·Filed 2007·Granted Oct 6, 2009·2 cites·33 claims
- 2664US6992308B2Modulating ion beam currentAXCELIS TECH INC·Filed 2004·Granted Jan 31, 2006·9 cites·22 claims
- 2763US8338806B2Gas cluster ion beam system with rapid gas switching apparatusGRAF MICHAEL·Filed 2010·Granted Dec 25, 2012·2 cites·29 claims
- 2862US10861674B2Compensated location specific processing apparatus and methodTEL EPION INC·Filed 2019·Granted Dec 8, 2020·0 cites·19 claims
- 2961US6298270B1Retina implantEBERHARD KARLS UNI TUBINGEN UN·Filed 1999·Granted Oct 2, 2001·85 cites·22 claims
- 3056US10497540B2Compensated location specific processing apparatus and methodTEL EPION INC·Filed 2018·Granted Dec 3, 2019·0 cites·19 claims
- 3156US9103031B2Method and system for growing a thin film using a gas cluster ion beamHAUTALA JOHN J·Filed 2008·Granted Aug 11, 2015·0 cites·20 claims
- 3255US8803110B2Methods for beam current modulation by ion source parameter modulationGRAF MICHAEL A·Filed 2006·Granted Aug 12, 2014·1 cites·13 claims
- 3352US2010065761A1Adjustable deflection optics for ion implantationAXCELIS TECH INC·Filed 2008·Application pending·0 cites
- 3451US7557363B2Closed loop dose control for ion implantationAXCELIS TECH INC·Filed 2006·Granted Jul 7, 2009·0 cites·27 claims
- 3549US2006243920A1Optimization of a utilization of an ion beam in a two-dimensional mechanical scan ion implantation systemRAY ANDREW M·Filed 2006·Application pending·0 cites
- 3648US2010200774A1Multi-sequence film deposition and growth using gas cluster ion beam processingTEL EPION INC·Filed 2009·Application pending·0 cites
- 3745US6347250B1Optically controllable microelectrode array for stimulating cells within a tissueNMI UNIV TUEBINGEN·Filed 1999·Granted Feb 12, 2002·44 cites·19 claims
- 3843US2006113489A1Optimization of beam utilizationAXCELIS TECH INC·Filed 2004·Application pending·0 cites
- 3940US2006097196A1Dose uniformity during scanned ion implantationAXCELIS TECH INC·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →