Inventor · disambiguated record
Michael Gruenhagen
Also filed as: GRUENHAGEN MICHAEL · GRUENHAGEN MICHAEL W
3 granted patents·3 pending applications·9 citations·filing 2014–2024
60Inventor score
Top patents by PatentIndex Score
6 records- 0184US9564378B2Detection of lost wafer from spinning chuckTEL FSI INC·Filed 2014·Granted Feb 7, 2017·7 cites·13 claims
- 0274US11476129B2Translating and rotating chuck for processing microelectronic substrates in a process chamberTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2017·Granted Oct 18, 2022·2 cites·30 claims
- 0372US2024290619A1Substrate scanning apparatus with pendulum and rotatable substrate holderTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2024·Application pending·0 cites
- 0464US2023369075A2Translating and rotating chuck for processing microelectronic substrates in a process chamberTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2022·Application pending·0 cites
- 0562US12334348B2Substrate scanning apparatus with pendulum and rotatable substrate holderTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Granted Jun 17, 2025·0 cites·20 claims
- 0618US2016204544A1Self-Aligning and Self-Engaging Electrical ConnectorsBLACKROCK MICROSYSTEMS LLC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →