Inventor · disambiguated record
Michio Ishikawa
Also filed as: ISHIKAWA MICHIO
40 granted patents·10 pending applications·489 citations·filing 1976–2025
98Inventor score
Top patents by PatentIndex Score
50 records- 0193US7763115B2Vacuum film-forming apparatusULVAC INC·Filed 2005·Granted Jul 27, 2010·34 cites·9 claims
- 0289US7828900B2Vacuum film-forming apparatusULVAC INC·Filed 2008·Granted Nov 9, 2010·17 cites·11 claims
- 0386US8252113B2Method for producing component for vacuum apparatus, resin coating forming apparatus and vacuum film forming systemHATANAKA MASANOBU·Filed 2006·Granted Aug 28, 2012·6 cites·4 claims
- 0486US4804590AAbrasion resistant magnetic recording memberULVAC CORP·Filed 1986·Granted Feb 14, 1989·34 cites·8 claims
- 0583US8367542B2Semiconductor device manufacturing method and semiconductor device manufacturing apparatusULVAC INC·Filed 2011·Granted Feb 5, 2013·6 cites·8 claims
- 0683US5288329AChemical vapor deposition apparatus of in-line typeULVAC CORP·Filed 1990·Granted Feb 22, 1994·52 cites·8 claims
- 0780US8419854B2Film-forming apparatusHATANAKA MASANOBU·Filed 2008·Granted Apr 16, 2013·5 cites·6 claims
- 0880US5250339AMagnetic recording mediumULVAC CORP·Filed 1992·Granted Oct 5, 1993·30 cites·1 claims
- 0978US5554418AMethod of forming passivation filmULVAC CORP·Filed 1994·Granted Sep 10, 1996·41 cites·6 claims
- 1074US10718053B2Wafer loading apparatus and film forming apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Jul 21, 2020·2 cites·8 claims
- 1174US4832810ACo-based alloy sputter target and process of manufacturing the sameULVAC CORP·Filed 1987·Granted May 23, 1989·31 cites·6 claims
- 1272US8084368B2Method of forming barrier filmHATANAKA MASANOBU·Filed 2007·Granted Dec 27, 2011·5 cites·16 claims
- 1371US11728198B2Electrostatic chuck and wafer etching device including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 15, 2023·1 cites·18 claims
- 1470US9216609B2Radical etching apparatus and methodINOUE HIROAKI·Filed 2012·Granted Dec 22, 2015·2 cites·4 claims
- 1566US5043598AHigh voltage supply having a voltage stabilizerTDK CORP·Filed 1989·Granted Aug 27, 1991·20 cites·5 claims
- 1666US4473329ACyclic drilling machineBROTHER IND LTD·Filed 1981·Granted Sep 25, 1984·25 cites·11 claims
- 1764US4257014AGas laser discharge tube using corrugated cathodeKIMMON ELECTRIC CO LTD·Filed 1978·Granted Mar 17, 1981·14 cites·10 claims
- 1863US8669191B2Method for forming Ni filmUEHIGASHI TOSHIMITSU·Filed 2012·Granted Mar 11, 2014·2 cites·11 claims
- 1963US8125069B2Semiconductor device and etching apparatusHAYASHI TOSHIO·Filed 2010·Granted Feb 28, 2012·1 cites·9 claims
- 2062US4635272ALaser discharge tubeKIMMON ELECTRIC CO LTD·Filed 1986·Granted Jan 6, 1987·16 cites·21 claims
- 2162US4446746ATorque detecting apparatusBROTHER IND LTD·Filed 1981·Granted May 8, 1984·20 cites·14 claims
- 2262US2025290191A1Member and method for producing sameAGC INC·Filed 2025·Application pending·0 cites
- 2362US2025270685A1Yttrium-based protective film, method for producing same, and memberAGC INC·Filed 2025·Application pending·0 cites
- 2462US2024425979A1Yttrium-based protective film, method for producing same, and memberAGC INC·Filed 2024·Application pending·0 cites
- 2561US4232274AMetal vapor laser systemKIMMON ELECTRIC CO LTD·Filed 1978·Granted Nov 4, 1980·12 cites·14 claims
- 2659US9059105B2Ashing apparatusUEDA MASAHISA·Filed 2007·Granted Jun 16, 2015·2 cites·13 claims
- 2759US6897754B2Magnetic core for inductorKOREA COIL ENGINEERING CO LTD·Filed 2002·Granted May 24, 2005·12 cites·13 claims
- 2859US4451187AMachine toolBROTHER IND LTD·Filed 1982·Granted May 29, 1984·18 cites·18 claims
- 2958US4023128ATemperature responsive reed switchTDK ELECTRONICS CO LTD·Filed 1976·Granted May 10, 1977·11 cites·6 claims
- 3055US4089020AHigh power semiconductor diodeHITACHI LTD·Filed 1976·Granted May 9, 1978·14 cites·4 claims
- 3155US2009314636A1Capacitive-coupled magnetic neutral loop plasma sputtering systemISHIKAWA MICHIO·Filed 2007·Application pending·0 cites
- 3252US8043963B2Semiconductor device manufacturing method and semiconductor device manufacturing apparatusULVAC INC·Filed 2008·Granted Oct 25, 2011·0 cites·5 claims
- 3352US2025171886A1Yttrium-based protective film, method for producing same, and memberAGC INC·Filed 2025·Application pending·0 cites
- 3449US9733431B2Noise reduction device and detection apparatus including sameCANON KK·Filed 2015·Granted Aug 15, 2017·0 cites·19 claims
- 3546US2009120787A1Method of manufacturing semiconductor deviceULVAC INC·Filed 2009·Application pending·0 cites
- 3645US11309203B2Wafer stage and method of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Apr 19, 2022·0 cites·20 claims
- 3745US5069983AMagnetic recording memberULVAC CORP·Filed 1989·Granted Dec 3, 1991·10 cites·1 claims
- 3844US5147734AMagnetic recording media manufactured by a process in which a negative bias voltage is applied to the substrate during sputteringULVAC CORP·Filed 1989·Granted Sep 15, 1992·8 cites·10 claims
- 3942US4420835AHollow cathode laserKIMMON ELECTRIC CO LTD·Filed 1981·Granted Dec 13, 1983·7 cites·9 claims
- 4042US2009102025A1Semiconductor device and method for manufacturing the same, dry-etching process, method for making electrical connections, and etching apparatusHAYASHI TOSHIO·Filed 2006·Application pending·0 cites
- 4141US2002124866A1Plasma film-forming apparatus and cleaning method for the sameULVAC INC·Filed 2001·Application pending·0 cites
- 4240US5606255AHall effect sensing apparatus for moving object having an adjustable magnetor yokeTDK CORP·Filed 1993·Granted Feb 25, 1997·8 cites·10 claims
- 4340US2004007247A1Plasma film-forming apparatus and cleaning method for the sameULVAC INC·Filed 2003·Application pending·0 cites
- 4439US8183153B2Method for manufacturing semiconductor deviceZAMA HIDEAKI·Filed 2008·Granted May 22, 2012·0 cites·24 claims
- 4539US5123163AProcess and apparatus for forming bumps on film carrierNEC CORP·Filed 1990·Granted Jun 23, 1992·11 cites·2 claims
- 4635US2019177841A1Film forming apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2017·Application pending·0 cites
- 4732US5840374AMethod of forming a SiO2 passivation film on a plastic substrateULVAC CORP·Filed 1996·Granted Nov 24, 1998·3 cites·6 claims
- 4830US5198309AMagnetic recording memberULVAC CORP·Filed 1987·Granted Mar 30, 1993·1 cites·2 claims
- 4928US6061020AMethod and apparatus for transmitting radio wave by rotating plane of polarizationUNIV ELECTRO COMMUNICATIONS·Filed 1997·Granted May 9, 2000·5 cites·4 claims
- 5028US4103253AMetal vapor laser generating apparatusKIMMON ELECTRIC CO LTD·Filed 1976·Granted Jul 25, 1978·3 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →