Inventor · disambiguated record
Mitsuaki Kabasawa
Also filed as: KABASAWA MITSUAKI
30 granted patents·263 citations·filing 2000–2015
96Inventor score
Files withSUMITOMO EATON NOVA7SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD7SEN CORP6SEN CORP AN SHI & AXCELIS CO4SEN CORP AN SHI AND AXCELIS CO4
Top patents by PatentIndex Score
30 records- 0191US6573517B1Ion implantation apparatusSUMITOMO EATON NOVA·Filed 2000·Granted Jun 3, 2003·46 cites·14 claims
- 0290US7351987B2Irradiation system with ion beamSEN CORP AN SHI & AXCELIS CO·Filed 2005·Granted Apr 1, 2008·20 cites·13 claims
- 0388US9466467B2Ion implantation apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2013·Granted Oct 11, 2016·8 cites·11 claims
- 0487US7429743B2Irradiation system ion beam and method to enhance accuracy of irradiationSEN CORP AN SHI & AXCELIS CO·Filed 2005·Granted Sep 30, 2008·13 cites·44 claims
- 0586US7361892B2Method to increase low-energy beam current in irradiation system with ion beamSEN CORP·Filed 2005·Granted Apr 22, 2008·12 cites·18 claims
- 0685US7276711B2Beam space-charge compensation device and ion implantation system having the sameSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Oct 2, 2007·11 cites·12 claims
- 0785US6794661B2Ion implantation apparatus capable of increasing beam currentSUMITOMO EATON NOVA·Filed 2002·Granted Sep 21, 2004·37 cites·40 claims
- 0884US7138641B2Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation systemSUMITOMO EATON NOVA·Filed 2005·Granted Nov 21, 2006·8 cites·39 claims
- 0982US8952340B2High-frequency acceleration type ion acceleration and transportation apparatus having high energy precisionSEN CORP·Filed 2014·Granted Feb 10, 2015·5 cites·19 claims
- 1081US7755067B2Ion implantation apparatus and method of converging/shaping ion beam used thereforSEN CORP·Filed 2008·Granted Jul 13, 2010·6 cites·19 claims
- 1180US7982192B2Beam processing apparatusSEN CORP AN SHI & AXCELIS CO·Filed 2008·Granted Jul 19, 2011·6 cites·14 claims
- 1280US7851772B2Ion implantation apparatus and ion implantation methodSEN CORP AN SHI & AXCELIS CO·Filed 2008·Granted Dec 14, 2010·6 cites·10 claims
- 1380US7315034B2Irradiation system with ion beam/charged particle beamSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Jan 1, 2008·7 cites·18 claims
- 1479US8987690B2High-energy ion implanterSEN CORP·Filed 2014·Granted Mar 24, 2015·4 cites·19 claims
- 1579US7304319B2Wafer charge compensation device and ion implantation system having the sameSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Dec 4, 2007·7 cites·18 claims
- 1678US6984833B2Ion implanter and method for controlling the sameSUMITOMO EATON NOVA·Filed 2004·Granted Jan 10, 2006·14 cites·24 claims
- 1777US9236222B2Ion implantation apparatus and ion implantation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Jan 12, 2016·2 cites·8 claims
- 1877US6797968B2Ion beam processing method and apparatus thereforSUMITOMO EATON NOVA·Filed 2002·Granted Sep 28, 2004·15 cites·72 claims
- 1976US9368327B2High-energy ion implanterSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted Jun 14, 2016·3 cites·16 claims
- 2076US6720563B1Ion implantation apparatus and ion implantation methodSUMITOMO EATON NOVA·Filed 2000·Granted Apr 13, 2004·12 cites·24 claims
- 2175US7718980B2Beam processing system and beam processing methodSEN CORP·Filed 2007·Granted May 18, 2010·5 cites·8 claims
- 2270US9390890B2High-energy ion implanterSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted Jul 12, 2016·3 cites·19 claims
- 2369US9355847B2High-energy ion implanterSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted May 31, 2016·2 cites·16 claims
- 2469US7687782B2Electrostatic beam deflection scanner and beam deflection scanning methodSEN CORP AN SHI AND AXCELIS CO·Filed 2007·Granted Mar 30, 2010·3 cites·15 claims
- 2569US6635889B2Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereofSUMITOMO EATON NOVA·Filed 2002·Granted Oct 21, 2003·7 cites·20 claims
- 2665US9431214B2Ion implantation apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Aug 30, 2016·1 cites·16 claims
- 2751US9343262B2Ion implantation apparatus, beam parallelizing apparatus, and ion implantation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted May 17, 2016·0 cites·14 claims
- 2846US9208996B2Ion implantation apparatus and ion implantation methodSEN CORP·Filed 2013·Granted Dec 8, 2015·0 cites·28 claims
- 2939US9384944B2Ion implanter and ion implantation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Jul 5, 2016·0 cites·16 claims
- 3039US9208991B1Ion implantation apparatusSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Dec 8, 2015·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →