Inventor · disambiguated record
Michael Kang
Also filed as: KANG MICHAEL · KANG MICHAEL S
12 granted patents·2 pending applications·228 citations·filing 2004–2016
91Inventor score
Top patents by PatentIndex Score
14 records- 0196US9099398B2Gas distribution showerhead for inductively coupled plasma etch reactorLAM RES CORP·Filed 2013·Granted Aug 4, 2015·41 cites·15 claims
- 0294US8562785B2Gas distribution showerhead for inductively coupled plasma etch reactorKANG MICHAEL·Filed 2011·Granted Oct 22, 2013·20 cites·15 claims
- 0393US8970114B2Temperature controlled window of a plasma processing chamber componentLAM RES CORP·Filed 2013·Granted Mar 3, 2015·118 cites·20 claims
- 0490US8410393B2Apparatus and method for temperature control of a semiconductor substrate supportRICCI ANTHONY·Filed 2010·Granted Apr 2, 2013·16 cites·24 claims
- 0589US9245717B2Gas distribution system for ceramic showerhead of plasma etch reactorKANG MICHAEL·Filed 2011·Granted Jan 26, 2016·10 cites·17 claims
- 0687US9934979B2Gas distribution showerhead for inductively coupled plasma etch reactorLAM RES CORP·Filed 2015·Granted Apr 3, 2018·4 cites·28 claims
- 0787US8313635B2Bare aluminum baffles for resist stripping chambersEGLEY FRED D·Filed 2010·Granted Nov 20, 2012·9 cites·11 claims
- 0883US7811409B2Bare aluminum baffles for resist stripping chambersLAM RES CORP·Filed 2007·Granted Oct 12, 2010·6 cites·10 claims
- 0970US8845856B2Edge ring assembly for plasma etching chambersKANG MICHAEL S·Filed 2010·Granted Sep 30, 2014·3 cites·6 claims
- 1067US10366865B2Gas distribution system for ceramic showerhead of plasma etch reactorLAM RES CORP·Filed 2016·Granted Jul 30, 2019·1 cites·8 claims
- 1155US8859432B2Bare aluminum baffles for resist stripping chambersLAM RES CORP·Filed 2012·Granted Oct 14, 2014·0 cites·13 claims
- 1254US2014367047A1Edge ring assembly for plasma etching chambersLAM RES CORP·Filed 2014·Application pending·0 cites
- 1340US2005284573A1Bare aluminum baffles for resist stripping chambersEGLEY FRED D·Filed 2004·Application pending·0 cites
- 1436US9613834B2Replaceable upper chamber section of plasma processing apparatusSHARPLESS LEONARD J·Filed 2010·Granted Apr 4, 2017·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →