Inventor · disambiguated record
Mike Kellogg
Also filed as: KELLOGG MIKE
4 granted patents·16 citations·filing 2012–2020
69Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0197US11594400B2Multi zone gas injection upper electrode systemLAM RES CORP·Filed 2020·Granted Feb 28, 2023·6 cites·11 claims
- 0284US9508530B2Plasma processing chamber with flexible symmetric RF return strapLAM RES CORP·Filed 2012·Granted Nov 29, 2016·8 cites·17 claims
- 0363US10622195B2Multi zone gas injection upper electrode systemBISE RYAN·Filed 2012·Granted Apr 14, 2020·2 cites·11 claims
- 0450US9263240B2Dual zone temperature control of upper electrodesMARAKHTANOV ALEXEI·Filed 2012·Granted Feb 16, 2016·0 cites·10 claims
Join the waitlist — get patent alerts
Get an alert when Mike Kellogg files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →