Inventor · disambiguated record
Michel Le Maire
Also filed as: LE MAIRE MICHEL
5 granted patents·35 citations·filing 2006–2020
77Inventor score
Top patents by PatentIndex Score
5 records- 0195US11087955B2System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combinationCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Aug 10, 2021·8 cites·28 claims
- 0286US8342701B2Reflective optical element for use in an EUV systemZEISS CARL LASER OPTICS GMBH·Filed 2010·Granted Jan 1, 2013·14 cites·25 claims
- 0383US7629572B2Optical devices and related systems and methodsZEISS CARL LASER OPTICS GMBH·Filed 2006·Granted Dec 8, 2009·7 cites·22 claims
- 0468US7944615B2Optical system and method for shaping a profile of a laser beamZEISS CARL LASER OPTICS GMBH·Filed 2006·Granted May 17, 2011·6 cites·48 claims
- 0554US10777958B2Beam reverser module and optical power amplifier having such a beam reverser moduleZEISS CARL SMT GMBH·Filed 2017·Granted Sep 15, 2020·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →