Inventor · disambiguated record
Michael L. Nelson
Also filed as: NELSON MICHAEL · NELSON MICHAEL L · NELSON MICHAEL LEO
19 granted patents·6 pending applications·224 citations·filing 1995–2025
93Inventor score
Top patents by PatentIndex Score
25 records- 0192US5559601AMask and wafer diffraction grating alignment system wherein the diffracted light beams return substantially along an incident angleSVG LITHOGRAPHY SYSTEMS INC·Filed 1995·Granted Sep 24, 1996·104 cites·5 claims
- 0290US10324383B2Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatusASML HOLDING NV·Filed 2016·Granted Jun 18, 2019·5 cites·24 claims
- 0388US6398373B1Pneumatic control system and method for shaping deformable mirrors in lithographic projection systemsASML US INC·Filed 2000·Granted Jun 4, 2002·47 cites·13 claims
- 0480US9041903B2Mask inspection with fourier filtering and image compareNELSON MICHAEL L·Filed 2010·Granted May 26, 2015·5 cites·20 claims
- 0578US8736810B2EUV reticle substrates with high thermal conductivityWILKLOW RONALD A·Filed 2009·Granted May 27, 2014·7 cites·20 claims
- 0675US6859260B2Method and system for improving focus accuracy in a lithography systemASML HOLDING NV·Filed 2001·Granted Feb 22, 2005·12 cites·51 claims
- 0774US7053984B2Method and systems for improving focus accuracy in a lithography systemASML HOLDING NV·Filed 2005·Granted May 30, 2006·3 cites·17 claims
- 0866US7527816B2Feed supplement and methodTECHMIX INC·Filed 2004·Granted May 5, 2009·4 cites·30 claims
- 0966US2008241227A1Composition for Treating Dehydration in Large MammalsTECH MIX INC·Filed 2008·Application pending·0 cites
- 1064US11523625B2Feed supplement bolus with active yeastTECHMIX LLC·Filed 2017·Granted Dec 13, 2022·1 cites·16 claims
- 1163US7248336B2Method and system for improving focus accuracy in a lithography systemASML HOLDING NV·Filed 2006·Granted Jul 24, 2007·1 cites·20 claims
- 1263US7119883B2Correcting variations in the intensity of light within an illumination field without distorting the telecentricity of the lightASML HOLDING NV·Filed 2004·Granted Oct 10, 2006·6 cites·43 claims
- 1362US7474384B2Lithographic apparatus, device manufacturing method, and a projection element for use in the lithographic apparatusASML HOLDING NV·Filed 2004·Granted Jan 6, 2009·6 cites·25 claims
- 1460US12399000B2Systems and methods for measuring intensity in a lithographic alignment apparatusASML HOLDING NV·Filed 2022·Granted Aug 26, 2025·0 cites·20 claims
- 1559US2024225054A1Feed supplement bolus with active yeastTECHMIX LLC·Filed 2023·Application pending·0 cites
- 1654US5862880ARoof scaffolding systemFiled 1996·Granted Jan 26, 1999·21 cites·2 claims
- 1751US7633599B2Apparatuses and methods for changing an intensity distribution of light within an illumination field without distorting the telecentricity of the lightASML HOLDING NV·Filed 2006·Granted Dec 15, 2009·0 cites·20 claims
- 1851US2008199409A1Effervescent Acidified Rehydration PreparationsTECH MIX INC·Filed 2007·Application pending·0 cites
- 1950USRE49066EChucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatusASML HOLDING NV·Filed 2016·Granted May 10, 2022·0 cites·50 claims
- 2045US12473217B2Slightly heavy particle system for wastewater treatmentWESDON TIENDA ENV SCIENCES CO LTD·Filed 2018·Granted Nov 18, 2025·0 cites·17 claims
- 2139US2025360175A1Slow-release feed supplement bolus with active yeastTECHMIX LLC·Filed 2025·Application pending·0 cites
- 2239US2020386692A1Multi-image particle detection system and methodASML HOLDING NV·Filed 2017·Application pending·0 cites
- 2332US9927965B2Object selection system and methodSIEMENS PRODUCT LIFECYCLE MAN SOFTWARE INC·Filed 2015·Granted Mar 27, 2018·0 cites·17 claims
- 2430US2008260897A1Method of Treating Dehydration in Large MammalsTECH MIX INC·Filed 2008·Application pending·0 cites
- 2523US6199466B1Apparatus and method for processing palletized containersSOLID WASTE MAN SYSTEMS INC·Filed 1996·Granted Mar 13, 2001·2 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →