Inventor · disambiguated record
Michal Emanuel Pawlowski
Also filed as: PAWLOWSKI MICHAL · PAWLOWSKI MICHAL EMANUEL
9 granted patents·2 pending applications·8 citations·filing 2005–2025
77Inventor score
Top patents by PatentIndex Score
11 records- 0180US2025314958A1Contaminant identification metrology system, lithographic apparatus, and methods thereofASML HOLDING NV·Filed 2025·Application pending·0 cites
- 0267US7701589B2Three-dimensional shape measuring method and apparatusUNIV ELECTRO COMMUNICATIONS·Filed 2005·Granted Apr 20, 2010·7 cites·14 claims
- 0365US12379655B2Contaminant identification metrology system, lithographic apparatus, and methods thereofASML HOLDING NV·Filed 2021·Granted Aug 5, 2025·0 cites·17 claims
- 0458US12442759B2Contaminant analyzing metrology system, lithographic apparatus, and methods thereofASML HOLDING NV·Filed 2021·Granted Oct 14, 2025·0 cites·21 claims
- 0558US12405227B2Method for region of interest processing for reticle particle detectionASML HOLDING NV·Filed 2021·Granted Sep 2, 2025·0 cites·20 claims
- 0658US12140870B2Double-scanning opto-mechanical configurations to improve throughput of particle inspection systemsASML HOLDING NV·Filed 2021·Granted Nov 12, 2024·0 cites·20 claims
- 0757US11803119B2Contaminant detection metrology system, lithographic apparatus, and methods thereofASML HOLDING NV·Filed 2020·Granted Oct 31, 2023·0 cites·20 claims
- 0857US2024272058A1Inspection system for reticle particle detection using a structural illumination with aperture apodizationASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0954US10912761B2Methods and compositions involving RAD51 inhibitorsUNIV CHICAGO·Filed 2013·Granted Feb 9, 2021·0 cites·20 claims
- 1049US9575703B2Portable electronic printing deviceBARANOWSKI MIROSLAW·Filed 2014·Granted Feb 21, 2017·1 cites·16 claims
- 1119US9399145B2Nanoscale neuromodulating platform for retina neuron activation apparatus and methodPEPPERBERG DAVID R·Filed 2012·Granted Jul 26, 2016·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →