Inventor · disambiguated record
Michael Penberth
Also filed as: PENBERTH MICHAEL · PENBERTH MICHAEL J · PENBERTH MICHAEL JOHN
6 granted patents·54 citations·filing 1999–2012
82Inventor score
Top patents by PatentIndex Score
6 records- 0179US8860388B2Driver circuit and method of driving a capacitive loadPENBERTH MICHAEL·Filed 2011·Granted Oct 14, 2014·4 cites·11 claims
- 0270US6521896B1Blanker assembly employing dielectric materialAPPLIED MATERIALS INC·Filed 2000·Granted Feb 18, 2003·9 cites·8 claims
- 0364US9079396B2Method of driving a capacitive load and drive circuit thereforPENBERTH MICHAEL·Filed 2012·Granted Jul 14, 2015·1 cites·19 claims
- 0464US6288406B1Electron beam lithography system having variable writing speedDUPONT PHOTOMASKS INC·Filed 1999·Granted Sep 11, 2001·19 cites·14 claims
- 0553US6941006B1Method and system for calibrating the scan amplitude of an electron beam lithography instrumentDUPONT PHOTOMASKS INC·Filed 1999·Granted Sep 6, 2005·11 cites·5 claims
- 0649US6278124B1Electron beam blanking method and system for electron beam lithographic processingDUPONT PHOTOMASKS INC·Filed 1999·Granted Aug 21, 2001·10 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →