Inventor · disambiguated record
Michael Rumer
Also filed as: RUMER MICHAEL · RUMER MICHAEL L
5 granted patents·3 pending applications·37 citations·filing 2000–2023
71Inventor score
Top patents by PatentIndex Score
8 records- 0178US7037830B1PVD deposition process for enhanced properties of metal filmsNOVELLUS SYSTEMS INC·Filed 2000·Granted May 2, 2006·35 cites·25 claims
- 0270US10895539B2In-situ chamber clean end point detection systems and methods using computer vision systemsLAM RES CORP·Filed 2018·Granted Jan 19, 2021·1 cites·15 claims
- 0367US10832936B2Substrate support with increasing areal density and corresponding method of fabricatingLAM RES CORP·Filed 2016·Granted Nov 10, 2020·1 cites·17 claims
- 0456US2025019830A1Preventing deposition on pedestal in semiconductor substrate processingLAM RES CORP·Filed 2023·Application pending·0 cites
- 0548US2025297362A1Gas supply line arrangementsLAM RES CORP·Filed 2023·Application pending·0 cites
- 0644US2008101903A1Transport system and methodINTERNAT RETAIL SERVICES GROUP·Filed 2007·Application pending·0 cites
- 0743US9938616B2Physical vapor deposition of low-stress nitrogen-doped tungsten filmsLAM RES CORP·Filed 2014·Granted Apr 10, 2018·0 cites·15 claims
- 0839US11725285B2Preventing deposition on pedestal in semiconductor substrate processingLAM RES CORP·Filed 2019·Granted Aug 15, 2023·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →