Inventor · disambiguated record
Michael Smigel
Also filed as: SMIGEL MICHAEL · SMIGEL MICHAEL D
4 granted patents·46 citations·filing 2001–2004
75Inventor score
Top patents by PatentIndex Score
4 records- 0179US6752442B2Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effectorSPEEDFAM IPEC CORP·Filed 2001·Granted Jun 22, 2004·26 cites·25 claims
- 0260US6567725B1Method and apparatus for teaching robot station locationSPEEDFAM IPEC CORP·Filed 2002·Granted May 20, 2003·11 cites·20 claims
- 0346US6979034B2Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effectorSPEEDFAM IPEC CORP·Filed 2004·Granted Dec 27, 2005·2 cites·4 claims
- 0444US7354335B2CMP apparatus and load cup mechanismNOVELLUS SYSTEMS INC·Filed 2004·Granted Apr 8, 2008·7 cites·15 claims
Join the waitlist — get patent alerts
Get an alert when Michael Smigel files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →