Inventor · disambiguated record
Michael A. Todd
Also filed as: TODD MICHAEL · TODD MICHAEL A
50 granted patents·5 pending applications·3,363 citations·filing 1979–2023
99Inventor score
Top patents by PatentIndex Score
55 records- 0199US7297641B2Method to form ultra high quality silicon-containing compound layersASM INC·Filed 2003·Granted Nov 20, 2007·625 cites·20 claims
- 0299US6743738B2Dopant precursors and processesASM INC·Filed 2002·Granted Jun 1, 2004·599 cites·40 claims
- 0398US7964513B2Method to form ultra high quality silicon-containing compound layersASM INC·Filed 2009·Granted Jun 21, 2011·75 cites·19 claims
- 0498US7651953B2Method to form ultra high quality silicon-containing compound layersASM INC·Filed 2007·Granted Jan 26, 2010·79 cites·24 claims
- 0598US7425350B2Apparatus, precursors and deposition methods for silicon-containing materialsASM JAPAN·Filed 2005·Granted Sep 16, 2008·88 cites·62 claims
- 0698US6962859B2Thin films and method of making themASM INC·Filed 2002·Granted Nov 8, 2005·113 cites·40 claims
- 0798US6900115B2Deposition over mixed substratesASM INC·Filed 2002·Granted May 31, 2005·122 cites·18 claims
- 0898US6821825B2Process for deposition of semiconductor filmsASM INC·Filed 2002·Granted Nov 23, 2004·311 cites·25 claims
- 0998US6458718B1Fluorine-containing materials and processesASM JAPAN·Filed 2001·Granted Oct 1, 2002·275 cites·47 claims
- 1097US6958253B2Process for deposition of semiconductor filmsASM INC·Filed 2002·Granted Oct 25, 2005·75 cites·29 claims
- 1197US6630413B2CVD syntheses of silicon nitride materialsASM JAPAN·Filed 2001·Granted Oct 7, 2003·162 cites·12 claims
- 1296US7186582B2Process for deposition of semiconductor filmsASM INC·Filed 2005·Granted Mar 6, 2007·18 cites·22 claims
- 1396US6716713B2Dopant precursors and ion implantation processesASM INC·Filed 2002·Granted Apr 6, 2004·56 cites·11 claims
- 1495US7294582B2Low temperature silicon compound depositionASM INT·Filed 2005·Granted Nov 13, 2007·116 cites·44 claims
- 1594US7285500B2Thin films and methods of making themASM INC·Filed 2005·Granted Oct 23, 2007·14 cites·8 claims
- 1694US7186630B2Deposition of amorphous silicon-containing filmsASM INC·Filed 2002·Granted Mar 6, 2007·70 cites·14 claims
- 1794US6716751B2Dopant precursors and processesASM INC·Filed 2002·Granted Apr 6, 2004·42 cites·39 claims
- 1892US7026219B2Integration of high k gate dielectricASM INC·Filed 2002·Granted Apr 11, 2006·55 cites·42 claims
- 1991US8088223B2System for control of gas injectorsTODD MICHAEL A·Filed 2006·Granted Jan 3, 2012·14 cites·15 claims
- 2088US7273799B2Deposition over mixed substratesASM INC·Filed 2004·Granted Sep 25, 2007·19 cites·16 claims
- 2187US7893433B2Thin films and methods of making themASM INC·Filed 2007·Granted Feb 22, 2011·5 cites·25 claims
- 2287US7029995B2Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxyASM INC·Filed 2004·Granted Apr 18, 2006·39 cites·36 claims
- 2387US6005127AAntimony/Lewis base adducts for Sb-ion implantation and formation of antimonide filmsADVANCED TECH MATERIALS·Filed 1997·Granted Dec 21, 1999·42 cites·18 claims
- 2486US6818570B2Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strengthASM JAPAN·Filed 2003·Granted Nov 16, 2004·35 cites·49 claims
- 2584US6825130B2CVD of porous dielectric materialsASM JAPAN·Filed 2002·Granted Nov 30, 2004·23 cites·48 claims
- 2683US6319565B1Stable hydride source compositions for manufacture of semiconductor devices and structuresADVANCED TECH MATERIALS·Filed 2000·Granted Nov 20, 2001·25 cites·12 claims
- 2782US6858196B2Method and apparatus for chemical synthesisASM INC·Filed 2002·Granted Feb 22, 2005·18 cites·9 claims
- 2881US8921205B2Deposition of amorphous silicon-containing filmsTODD MICHAEL A·Filed 2007·Granted Dec 30, 2014·6 cites·25 claims
- 2981US8360001B2Process for deposition of semiconductor filmsASM INC·Filed 2009·Granted Jan 29, 2013·3 cites·16 claims
- 3081US7005160B2Methods for depositing polycrystalline films with engineered grain structuresASM INC·Filed 2003·Granted Feb 28, 2006·18 cites·41 claims
- 3181US6733830B2Processes for depositing low dielectric constant materialsASM JAPAN·Filed 2001·Granted May 11, 2004·21 cites·45 claims
- 3278US11670512B2Selective deposition on silicon containing surfacesVERSUM MAT US LLC·Filed 2018·Granted Jun 6, 2023·2 cites·60 claims
- 3377US7585752B2Process for deposition of semiconductor filmsASM INC·Filed 2004·Granted Sep 8, 2009·9 cites·46 claims
- 3477US4333562ACapsule for storing written informationTODD MICHAEL A·Filed 1981·Granted Jun 8, 1982·37 cites·5 claims
- 3575US6146608AStable hydride source compositions for manufacture of semiconductor devices and structuresADVANCED TECH MATERIALS·Filed 1997·Granted Nov 14, 2000·39 cites·15 claims
- 3672US6955925B1AnnealingQINETIQ LTD·Filed 2000·Granted Oct 18, 2005·19 cites·23 claims
- 3770US5606056ACarbon nitride and its synthesisUNIV ARIZONA·Filed 1994·Granted Feb 25, 1997·21 cites·4 claims
- 3869US6001172AApparatus and method for the in-situ generation of dopantsADVANCED TECH MATERIALS·Filed 1997·Granted Dec 14, 1999·35 cites·37 claims
- 3968US11897801B2Silica scale inhibitorsSOLENIS TECH LP·Filed 2020·Granted Feb 13, 2024·0 cites·20 claims
- 4067US7253084B2Deposition from liquid sourcesASM INC·Filed 2004·Granted Aug 7, 2007·7 cites·19 claims
- 4166US7144620B2Process for depositing low dielectric constant materialsASM JAPAN·Filed 2004·Granted Dec 5, 2006·7 cites·10 claims
- 4261US6767830B2Br2SbCH3 a solid source ion implant and CVD precursorADVANCED TECH MATERIALS·Filed 2002·Granted Jul 27, 2004·8 cites·13 claims
- 4360US7547615B2Deposition over mixed substrates using trisilaneASM INC·Filed 2007·Granted Jun 16, 2009·0 cites·11 claims
- 4459US6905981B1Low-k dielectric materials and processesASM JAPAN·Filed 2001·Granted Jun 14, 2005·8 cites·12 claims
- 4558US8067297B2Process for deposition of semiconductor filmsTODD MICHAEL A·Filed 2006·Granted Nov 29, 2011·0 cites·15 claims
- 4657US2025218777A1Suppression of dopant hydride evolution from epitaxial films in integrated circuit (ic) manufacturingTEXAS INSTRUMENTS INC·Filed 2023·Application pending·0 cites
- 4755US7674728B2Deposition from liquid sourcesASM INC·Filed 2007·Granted Mar 9, 2010·0 cites·11 claims
- 4855US7544827B2Process for depositing low dielectric constant materialsASM JAPAN·Filed 2006·Granted Jun 9, 2009·0 cites·11 claims
- 4955US2025176201A1Semiconductor processing integration for bipolar junction transistor (bjt)TEXAS INSTRUMENTS INC·Filed 2023·Application pending·0 cites
- 5051US7921805B2Deposition from liquid sourcesASM INC·Filed 2010·Granted Apr 12, 2011·0 cites·20 claims
Showing the top 50 of 55 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →