Inventor · disambiguated record
Ming-Kuei Tseng
Also filed as: TSENG MING-KUEI · TSENG MING-KUEI MICHAEL
18 granted patents·5 pending applications·341 citations·filing 1999–2023
95Inventor score
Top patents by PatentIndex Score
23 records- 0197US7101273B2Carrier head with gimbal mechanismAPPLIED MATERIALS INC·Filed 2005·Granted Sep 5, 2006·37 cites·12 claims
- 0296US6890249B1Carrier head with edge load retaining ringAPPLIED MATERIALS INC·Filed 2002·Granted May 10, 2005·69 cites·28 claims
- 0390US8056500B2Thermal reactor with improved gas flow distributionTSENG MING-KUEI MICHAEL·Filed 2008·Granted Nov 15, 2011·17 cites·20 claims
- 0489US8608853B2Thermal reactor with improved gas flow distributionTSENG MING-KUEI MICHAEL·Filed 2011·Granted Dec 17, 2013·10 cites·15 claims
- 0589US7677958B2Retaining ring with flange for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2006·Granted Mar 16, 2010·11 cites·9 claims
- 0689US7134948B2Magnetically secured retaining ringAPPLIED MATERIALS INC·Filed 2005·Granted Nov 14, 2006·15 cites·19 claims
- 0789US6835125B1Retainer with a wear surface for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2002·Granted Dec 28, 2004·35 cites·21 claims
- 0888US7094139B2Retaining ring with flange for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2003·Granted Aug 22, 2006·32 cites·11 claims
- 0987US8888916B2Thermal reactor with improved gas flow distributionAPPLIED MATERIALS INC·Filed 2013·Granted Nov 18, 2014·6 cites·20 claims
- 1086US11031215B2Vacuum pump protection against deposition byproduct buildupLAM RES CORP·Filed 2019·Granted Jun 8, 2021·3 cites·7 claims
- 1185US11710623B2Vacuum pump protection against deposition byproduct buildupLAM RES CORP·Filed 2021·Granted Jul 25, 2023·1 cites·11 claims
- 1284US6857931B2Method of detecting a substrate in a carrier headAPPLIED MATERIALS INC·Filed 2003·Granted Feb 22, 2005·25 cites·18 claims
- 1384US6663466B2Carrier head with a substrate detectorAPPLIED MATERIALS INC·Filed 1999·Granted Dec 16, 2003·59 cites·19 claims
- 1479US12087561B2Vacuum pump protection against deposition byproduct buildupLAM RES CORP·Filed 2023·Granted Sep 10, 2024·0 cites·6 claims
- 1578US7934979B2Retaining ring with tapered inner surfaceAPPLIED MATERIALS INC·Filed 2010·Granted May 3, 2011·3 cites·15 claims
- 1656US6547641B2Carrier head with a substrate sensorAPPLIED MATERIALS INC·Filed 2002·Granted Apr 15, 2003·4 cites·21 claims
- 1753US6398621B1Carrier head with a substrate sensorAPPLIED MATERIALS INC·Filed 1999·Granted Jun 4, 2002·14 cites·44 claims
- 1845US2007131562A1Method and apparatus for planarizing a substrate with low fluid consumptionAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1943US7678245B2Method and apparatus for electrochemical mechanical processingAPPLIED MATERIALS INC·Filed 2004·Granted Mar 16, 2010·0 cites·26 claims
- 2043US2007295269A1Multi-stage flow control apparatus with flexible membrane and method of useAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 2143US2008006650A1Method and apparatus for multi-chamber exhaust controlAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 2243US2007295268A1Multi-stage flow control apparatusAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 2342US2007294870A1Multi-stage flow control apparatus and method of useAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →