Inventor · disambiguated record
Mohamed Swillam
Also filed as: SWILLAM MOHAMED
13 granted patents·7 pending applications·8 citations·filing 2019–2024
84Inventor score
Top patents by PatentIndex Score
20 records- 0190US12306541B2Lithographic apparatus, metrology systems, illumination switches and methods thereofASML HOLDING NV·Filed 2021·Granted May 20, 2025·2 cites·20 claims
- 0290US12124177B2Overlay measurement system using lock-in amplifier techniqueASML HOLDING NV·Filed 2020·Granted Oct 22, 2024·2 cites·21 claims
- 0384US12298257B2Monolithic particle inspection deviceASML NETHERLANDS BV·Filed 2021·Granted May 13, 2025·1 cites·13 claims
- 0482US11994808B2Lithographic apparatus, metrology systems, phased array illumination sources and methods thereofASML HOLDING NV·Filed 2020·Granted May 28, 2024·1 cites·24 claims
- 0581US12393046B2Metrology systems, coherence scrambler illumination sources and methods thereofASML NETHERLANDS BV·Filed 2020·Granted Aug 19, 2025·1 cites·15 claims
- 0680US12066762B2On chip sensor for wafer overlay measurementASML HOLDING NV·Filed 2020·Granted Aug 20, 2024·1 cites·20 claims
- 0776US2024361703A1On chip sensor for wafer overlay measurementASML HOLDING NV·Filed 2024·Application pending·0 cites
- 0862US12135505B2Spectrometric metrology systems based on multimode interference and lithographic apparatusASML HOLDING NV·Filed 2021·Granted Nov 5, 2024·0 cites·20 claims
- 0961US12216414B2Self-referencing integrated alignment sensorASML HOLDING NV·Filed 2021·Granted Feb 4, 2025·0 cites·20 claims
- 1061US12140872B2Optical designs of miniaturized overlay measurement systemASML HOLDING NV·Filed 2021·Granted Nov 12, 2024·0 cites·15 claims
- 1161US2019296682A1Silicon based mid-ir super absorber using hyperbolic metamaterialTHE AMERICAN UNIV IN CAIRO·Filed 2019·Application pending·0 cites
- 1260US12399000B2Systems and methods for measuring intensity in a lithographic alignment apparatusASML HOLDING NV·Filed 2022·Granted Aug 26, 2025·0 cites·20 claims
- 1360US12124173B2Lithographic apparatus, metrology systems, illumination sources and methods thereofASML NETHERLANDS BV·Filed 2020·Granted Oct 22, 2024·0 cites·26 claims
- 1458US2024319617A1Metrology systems with phased arrays for contaminant detection and microscopyASML HOLDING NV·Filed 2022·Application pending·0 cites
- 1557US2021021228A1Silicon based mid-ir super absorber using hyperbolic metamaterialTHE AMERICAN UNIV IN CAIRO·Filed 2020·Application pending·0 cites
- 1656US12487081B2On chip wafer alignment sensorASML HOLDING NV·Filed 2020·Granted Dec 2, 2025·0 cites·15 claims
- 1756US2024241453A1Metrology systems, temporal and spatial coherence scrambler and methods thereofASML HOLDING NV·Filed 2022·Application pending·0 cites
- 1855US2025130512A1Intensity measurements using off-axis illuminationASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1948US10948627B2Infrared subwavelength focusing in silicon and energy harvesting devicesTHE AMERICAN UNIV IN CAIRO·Filed 2019·Granted Mar 16, 2021·0 cites·5 claims
- 2039US2019212471A1Silicon based mid-ir super absorber using hyperbolic metamaterialTHE AMERICAN UNIV IN CAIRO·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →