Inventor · disambiguated record
Munenori Iwami
Also filed as: IWAMI MUNENORI
6 granted patents·1 pending application·183 citations·filing 1985–2014
78Inventor score
Top patents by PatentIndex Score
7 records- 0190US4693777AApparatus for producing semiconductor devicesTOSHIBA KK·Filed 1985·Granted Sep 15, 1987·178 cites·49 claims
- 0278US8088438B2Resin layer formation method, resin layer formation device, and disk manufacturing methodITO TOMOKAZU·Filed 2005·Granted Jan 3, 2012·4 cites·6 claims
- 0356US8220410B2Resin layer formation method, resin layer formation device, disk, and disk manufacturing methodITO TOMOKAZU·Filed 2010·Granted Jul 17, 2012·0 cites·11 claims
- 0453US9612205B2Etching amount measurement apparatus for dry etching apparatusSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Apr 4, 2017·1 cites·8 claims
- 0550US8475870B2Resin layer formation method, resin layer formation device, disk and disk manufacturing methodITO TOMOKAZU·Filed 2011·Granted Jul 2, 2013·0 cites·7 claims
- 0642US9330948B2Heater unit, fan filter unit, and substrate processing apparatusFURUYA MASAAKI·Filed 2012·Granted May 3, 2016·0 cites·17 claims
- 0733US2004223284A1Electrostatic attracting method, electrostatic attracting apparatus, and bonding apparatusSHIBAURA MECHATRONICS CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →