Inventor · disambiguated record
Mukul Khosla
Also filed as: KHOSLA MUKUL
10 granted patents·1 pending application·728 citations·filing 1994–2021
91Inventor score
Files withNOVELLUS SYSTEMS INC5KHOSLA MUKUL2THERMO FINNIGAN LLC2APPLIED MATERIALS INC1FINNIGAN CORP1
Top patents by PatentIndex Score
11 records- 0195US6497734B1Apparatus and method for enhanced degassing of semiconductor wafers for increased throughputNOVELLUS SYSTEMS INC·Filed 2002·Granted Dec 24, 2002·461 cites·28 claims
- 0294US6554914B1Passivation of copper in dual damascene metalizationNOVELLUS SYSTEMS INC·Filed 2001·Granted Apr 29, 2003·62 cites·27 claims
- 0390US6667474B1Capillary tube assembly with replaceable capillary tubeTHERMO FINNIGAN LLC·Filed 2000·Granted Dec 23, 2003·50 cites·16 claims
- 0489US6441370B1Linear multipole rod assembly for mass spectrometersTHERMO FINNIGAN LLC·Filed 2000·Granted Aug 27, 2002·41 cites·9 claims
- 0588US6319842B1Method of cleansing vias in semiconductor wafer having metal conductive layerNOVELLUS SYSTEMS INC·Filed 2001·Granted Nov 20, 2001·56 cites·12 claims
- 0683US6726824B1Closed loop monitoring of electroplating bath constituents using mass spectrometryNOVELLUS SYSTEMS INC·Filed 2001·Granted Apr 27, 2004·17 cites·18 claims
- 0783US5543625AFilament assembly for mass spectrometer ion sourcesFINNIGAN CORP·Filed 1994·Granted Aug 6, 1996·41 cites·6 claims
- 0857US11702738B2Chamber processes for reducing backside particlesAPPLIED MATERIALS INC·Filed 2021·Granted Jul 18, 2023·0 cites·20 claims
- 0943US2013312663A1Vapor Delivery ApparatusKHOSLA MUKUL·Filed 2012·Application pending·0 cites
- 1036US9275884B2Systems and methods for inhibiting oxide growth in substrate handler vacuum chambersKHOSLA MUKUL·Filed 2012·Granted Mar 1, 2016·0 cites·9 claims
- 1134US10115608B2Method and apparatus for rapid pump-down of a high-vacuum loadlockNOVELLUS SYSTEMS INC·Filed 2013·Granted Oct 30, 2018·0 cites·13 claims
Join the waitlist — get patent alerts
Get an alert when Mukul Khosla files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →