Inventor · disambiguated record
Nash W. Anderson
Also filed as: ANDERSON NASH · ANDERSON NASH W
3 granted patents·3 pending applications·18 citations·filing 2014–2020
62Inventor score
Files withLAM RES CORP6
Top patents by PatentIndex Score
6 records- 0194US9873940B2Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatusLAM RES CORP·Filed 2014·Granted Jan 23, 2018·16 cites·9 claims
- 0272US9790582B2Long lifetime thermal spray coating for etching or deposition chamber applicationLAM RES CORP·Filed 2015·Granted Oct 17, 2017·2 cites·16 claims
- 0364US2018127868A1Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatusLAM RES CORP·Filed 2017·Application pending·0 cites
- 0462US12249490B2Single crystal metal oxide plasma chamber componentLAM RES CORP·Filed 2020·Granted Mar 11, 2025·0 cites·11 claims
- 0537US2018065274A1Method and apparatus for forming ceramic parts in hot isostatic press using ultrasonicsLAM RES CORP·Filed 2016·Application pending·0 cites
- 0631US2016379806A1Use of plasma-resistant atomic layer deposition coatings to extend the lifetime of polymer components in etch chambersLAM RES CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →