Inventor · disambiguated record
Natraj Narayanswami
Also filed as: NARAYANSWAMI NATRAJ
3 granted patents·168 citations·filing 1996–2005
77Inventor score
Top patents by PatentIndex Score
3 records- 0195US7530880B2Method and apparatus for improved chemical mechanical planarization pad with pressure control and process monitorSEMIQUEST INC·Filed 2005·Granted May 12, 2009·54 cites·21 claims
- 0279US5810942AAerodynamic aerosol chamberFSI INT INC·Filed 1996·Granted Sep 22, 1998·63 cites·30 claims
- 0377US6681781B2Methods for cleaning microelectronic substrates using ultradilute cleaning liquidsFSI INT INC·Filed 1999·Granted Jan 27, 2004·51 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →