Inventor · disambiguated record
Neil Mackie
Also filed as: MACKIE NEIL · MACKIE NEIL M · MACKIE NEIL MACARAEG
18 granted patents·7 pending applications·196 citations·filing 2001–2022
93Inventor score
Files withMIASOLE7BEIJING APOLLO DING RONG SOLAR TECH CO LTD5LAM RES CORP3JULIANO DANIEL R2MACKIE NEIL M2
Top patents by PatentIndex Score
25 records- 0195US7935558B1Sodium salt containing CIG targets, methods of making and methods of use thereofMIASOLE·Filed 2010·Granted May 3, 2011·28 cites·7 claims
- 0294US7785921B1Barrier for doped molybdenum targetsMIASOLE·Filed 2009·Granted Aug 31, 2010·32 cites·16 claims
- 0393US7745332B1PVD-based metallization methods for fabrication of interconnections in semiconductor devicesNOVELLUS SYSTEMS INC·Filed 2008·Granted Jun 29, 2010·24 cites·62 claims
- 0492US8048707B1Sulfur salt containing CIG targets, methods of making and methods of use thereofMIASOLE·Filed 2010·Granted Nov 1, 2011·10 cites·30 claims
- 0592US6835278B2Systems and methods for remote plasma cleanMATTSON TECH INC·Filed 2001·Granted Dec 28, 2004·62 cites·16 claims
- 0690US7897020B2Method for alkali doping of thin film photovoltaic materialsMIASOLE·Filed 2009·Granted Mar 1, 2011·14 cites·20 claims
- 0786US8134069B2Method and apparatus for controllable sodium delivery for thin film photovoltaic materialsMACKIE NEIL M·Filed 2009·Granted Mar 13, 2012·11 cites·14 claims
- 0885US8017976B2Barrier for doped molybdenum targetsMIASOLE·Filed 2010·Granted Sep 13, 2011·3 cites·9 claims
- 0984US10211351B2Photovoltaic cell with high efficiency CIGS absorber layer with low minority carrier lifetime and method of making thereofBEIJING APOLLO DING RONG SOLAR TECH CO LTD·Filed 2018·Granted Feb 19, 2019·4 cites·25 claims
- 1078US7927912B2Method of forming a sputtering targetMIASOLE·Filed 2010·Granted Apr 19, 2011·1 cites·11 claims
- 1176US8076174B2Method of forming a sputtering targetJULIANO DANIEL R·Filed 2011·Granted Dec 13, 2011·1 cites·10 claims
- 1273US9169548B1Photovoltaic cell with copper poor CIGS absorber layer and method of making thereofCORSON JOHN·Filed 2010·Granted Oct 27, 2015·4 cites·15 claims
- 1368US10043921B1Photovoltaic cell with high efficiency cigs absorber layer with low minority carrier lifetime and method of making thereofMIASOLE·Filed 2012·Granted Aug 7, 2018·2 cites·17 claims
- 1455US12512307B2Profile twisting control in dielectric etchLAM RES CORP·Filed 2022·Granted Dec 30, 2025·0 cites·15 claims
- 1553US2024420963A1Modification of metal-containing surfaces in high aspect ratio plasma etchingLAM RES CORP·Filed 2022·Application pending·0 cites
- 1652US2024242935A1Multi-state rf pulsing in cycling recipes to reduce charging induced defectsLAM RES CORP·Filed 2022·Application pending·0 cites
- 1750US2019259898A1Hexagonal phase epitaxial cadmium sulfide on copper indium gallium selenide for a photovoltaic junctionBEIJING APOLLO DING RONG SOLAR TECH CO LTD·Filed 2019·Application pending·0 cites
- 1848US8338214B2Sodium salt containing CIG targets, methods of making and methods of use thereofJULIANO DANIEL R·Filed 2011·Granted Dec 25, 2012·0 cites·21 claims
- 1946US8313976B2Method and apparatus for controllable sodium delivery for thin film photovoltaic materialsMACKIE NEIL M·Filed 2011·Granted Nov 20, 2012·0 cites·6 claims
- 2045US2021111300A1Thin film deposition systems and deposition methods for forming photovoltaic cellsBEIJING APOLLO DING RONG SOLAR TECH CO LTD·Filed 2020·Application pending·0 cites
- 2144US10446706B2Hexagonal phase epitaxial cadmium sulfide on copper indium gallium selenide for a photovoltaic junctionBEIJING APOLLO DING RONG SOLAR TECH CO LTD·Filed 2016·Granted Oct 15, 2019·0 cites·12 claims
- 2244US2011226320A1Solar cell having a transparent conductive oxide contact layer with an oxygen gradientLITTLE PATRICK·Filed 2010·Application pending·0 cites
- 2343US2004247787A1Effluent pressure control for use in a processing systemFiled 2004·Application pending·0 cites
- 2436US2012090671A1Modified band gap window layer for a cigs absorber containing photovoltaic cell and method of making thereofSHUFFLEBOTHAM PAUL·Filed 2010·Application pending·0 cites
- 2532US10156009B2Silver copper indium gallium selenide reactive sputtering method and apparatus, and photovoltaic cell containing sameBEIJING APOLLO DING RONG SOLAR TECH CO LTD·Filed 2017·Granted Dec 18, 2018·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →