Inventor · disambiguated record
Nina Vladimirovna Dziomkina
Also filed as: DZIOMKINA NINA VLADIMIROVNA
38 granted patents·7 pending applications·116 citations·filing 2009–2025
97Inventor score
Files withASML NETHERLANDS BV30DZIOMKINA NINA VLADIMIROVNA6LAFARRE RAYMOND WILHELMUS LOUIS4DE GRAAF ROELOF FREDERIK1KANEKO TAKESHI1
Top patents by PatentIndex Score
45 records- 0199US11960213B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2023·Granted Apr 16, 2024·2 cites·20 claims
- 0299US11628498B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2022·Granted Apr 18, 2023·3 cites·20 claims
- 0399US11376663B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·4 cites·20 claims
- 0499US11235388B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2020·Granted Feb 1, 2022·4 cites·21 claims
- 0598US10245641B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Apr 2, 2019·11 cites·20 claims
- 0697US10898955B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2019·Granted Jan 26, 2021·7 cites·20 claims
- 0797US9737934B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Aug 22, 2017·9 cites·20 claims
- 0897US9507274B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2013·Granted Nov 29, 2016·14 cites·20 claims
- 0997US9442395B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2013·Granted Sep 13, 2016·20 cites·20 claims
- 1096US11754929B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2022·Granted Sep 12, 2023·1 cites·20 claims
- 1193US10875096B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2017·Granted Dec 29, 2020·2 cites·33 claims
- 1292US12366808B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2024·Granted Jul 22, 2025·0 cites·20 claims
- 1391US9423699B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2011·Granted Aug 23, 2016·7 cites·20 claims
- 1491US2025341784A1Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1590US11347154B2Cleaning a structure surface in an EUV chamberASML NETHERLANDS BV·Filed 2019·Granted May 31, 2022·3 cites·21 claims
- 1689US12353139B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2023·Granted Jul 8, 2025·0 cites·20 claims
- 1789US2025306471A1Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1884US12055862B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2022·Granted Aug 6, 2024·0 cites·20 claims
- 1984US9316927B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Granted Apr 19, 2016·3 cites·20 claims
- 2084US2025085643A1Cleaning a structure surface in an euv chamberASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 2183US8823919B2Lithographic apparatus, removable member and device manufacturing methodDZIOMKINA NINA VLADIMIROVNA·Filed 2010·Granted Sep 2, 2014·5 cites·20 claims
- 2282US9256139B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Granted Feb 9, 2016·3 cites·20 claims
- 2381US11003094B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2019·Granted May 11, 2021·1 cites·20 claims
- 2481US8659741B2Lithographic apparatus, removable member and device manufacturing methodDE GRAAF ROELOF FREDERIK·Filed 2010·Granted Feb 25, 2014·4 cites·20 claims
- 2579US8889042B2CoatingsDZIOMKINA NINA VLADIMIROVNA·Filed 2009·Granted Nov 18, 2014·4 cites·23 claims
- 2678US11454895B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2021·Granted Sep 27, 2022·0 cites·20 claims
- 2778US8599356B2Shutter member, a lithographic apparatus and device manufacturing methodKANEKO TAKESHI·Filed 2010·Granted Dec 3, 2013·4 cites·20 claims
- 2877US8993220B2Immersion lithographic apparatus and a device manufacturing methodDZIOMKINA NINA VLADIMIROVNA·Filed 2010·Granted Mar 31, 2015·4 cites·20 claims
- 2976US12189313B2Cleaning a structure surface in an EUV chamberASML NETHERLANDS BV·Filed 2022·Granted Jan 7, 2025·0 cites·16 claims
- 3070US10018924B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Jul 10, 2018·1 cites·20 claims
- 3167US10254660B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2018·Granted Apr 9, 2019·0 cites·20 claims
- 3265US9989867B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2017·Granted Jun 5, 2018·0 cites·20 claims
- 3363US10126663B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2017·Granted Nov 13, 2018·0 cites·20 claims
- 3462US9323164B2CoatingsASML NETHERLANDS BV·Filed 2014·Granted Apr 26, 2016·0 cites·20 claims
- 3561US9678445B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Jun 13, 2017·0 cites·20 claims
- 3654US9829803B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Nov 28, 2017·0 cites·20 claims
- 3753US8891053B2Lithographic apparatus, method of manufacturing an article for a lithographic apparatus and device manufacturing methodDZIOMKINA NINA VLADIMIROVNA·Filed 2009·Granted Nov 18, 2014·0 cites·16 claims
- 3852US8512817B2Lithographic apparatus and a method of forming a lyophobic coating on a surfaceDZIOMKINA NINA VLADIMIROVNA·Filed 2010·Granted Aug 20, 2013·0 cites·20 claims
- 3949US2013077065A1Cleaning substrate for a lithography apparatus, a cleaning method for a lithography apparatus and a lithography apparatusLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Application pending·0 cites
- 4046US11086238B2System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate supportASML NETHERLANDS BV·Filed 2018·Granted Aug 10, 2021·0 cites·21 claims
- 4144US9625828B2Fluid handling structure, lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2011·Granted Apr 18, 2017·0 cites·20 claims
- 4242US2015124234A1Substrate holder, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Application pending·0 cites
- 4338US2011287371A1Component of an immersion system, an immersion lithographic apparatus and a device manufacturing methodDZIOMKINA NINA VLADIMIROVNA·Filed 2011·Application pending·0 cites
- 4432US8395772B2Sensor, a table and lithographic apparatusVAN BUEL HENRICUS WILHELMUS MARIA·Filed 2010·Granted Mar 12, 2013·0 cites·20 claims
- 4532US2012249994A1Lithographic apparatus and a device manufacturing methodVISSER EMILIUS WILLEM ADRIAAN·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →