Inventor · disambiguated record
Nicolaas Rudolf Kemper
Also filed as: KEMPER NICOLAAS R · KEMPER NICOLAAS RUDOLF
91 granted patents·5 pending applications·543 citations·filing 1988–2022
99Inventor score
Files withASML NETHERLANDS BV68KEMPER NICOLAAS RUDOLF9BECKERS MARCEL3RIEPEN MICHEL3DIRECKS DANIEL JOZEF MARIA2
Top patents by PatentIndex Score
96 records- 0198US7864292B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 4, 2011·57 cites·30 claims
- 0297US8031325B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Granted Oct 4, 2011·13 cites·20 claims
- 0396US9140996B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 22, 2015·7 cites·20 claims
- 0496US8547523B2Fluid handling structure, lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2010·Granted Oct 1, 2013·28 cites·20 claims
- 0596US7804577B2Lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Sep 28, 2010·26 cites·44 claims
- 0696US7701550B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 20, 2010·45 cites·42 claims
- 0796US7602470B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 13, 2009·20 cites·21 claims
- 0896US7411654B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 12, 2008·22 cites·58 claims
- 0995US8786823B2Lithographic apparatus and device manufacturing methodLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2010·Granted Jul 22, 2014·7 cites·20 claims
- 1095US7656501B2Lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Feb 2, 2010·22 cites·31 claims
- 1194US8614784B2Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supplyRIEPEN MICHEL·Filed 2010·Granted Dec 24, 2013·14 cites·19 claims
- 1294US7839483B2Lithographic apparatus, device manufacturing method and a control systemASML NETHERLANDS BV·Filed 2005·Granted Nov 23, 2010·16 cites·19 claims
- 1394US7705962B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 27, 2010·12 cites·23 claims
- 1493US9857695B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jan 2, 2018·3 cites·20 claims
- 1593US9488923B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Nov 8, 2016·4 cites·20 claims
- 1693US8027019B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 27, 2011·15 cites·25 claims
- 1792US7751027B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 6, 2010·18 cites·65 claims
- 1891US8345218B2Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Granted Jan 1, 2013·14 cites·20 claims
- 1991US7760324B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 20, 2010·19 cites·15 claims
- 2091US7420194B2Lithographic apparatus and substrate edge sealASML NETHERLANDS BV·Filed 2005·Granted Sep 2, 2008·10 cites·24 claims
- 2190US8446563B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted May 21, 2013·6 cites·24 claims
- 2288US7834974B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Nov 16, 2010·9 cites·22 claims
- 2387US10495984B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Dec 3, 2019·1 cites·20 claims
- 2487US9268236B2Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holderJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Feb 23, 2016·5 cites·27 claims
- 2586US10209629B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Feb 19, 2019·1 cites·20 claims
- 2686US9448494B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Sep 20, 2016·3 cites·20 claims
- 2786US9329491B2Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatusGROUWSTRA CÉDRIC DÉSIRÉ·Filed 2011·Granted May 3, 2016·7 cites·21 claims
- 2886US8259283B2Immersion lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Sep 4, 2012·10 cites·24 claims
- 2985US7808614B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Oct 5, 2010·6 cites·19 claims
- 3084US12117721B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2022·Granted Oct 15, 2024·0 cites·20 claims
- 3183US8953142B2Lithographic apparatus, drying device, metrology apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 10, 2015·6 cites·23 claims
- 3283US8232540B2Lithographic apparatus and substrate edge sealOTTENS JOOST JEROEN·Filed 2011·Granted Jul 31, 2012·3 cites·20 claims
- 3380US11789369B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2021·Granted Oct 17, 2023·0 cites·20 claims
- 3480US9099501B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2010·Granted Aug 4, 2015·3 cites·20 claims
- 3580US7359032B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 15, 2008·17 cites·18 claims
- 3678US8405817B2Lithographic apparatus, a method of controlling the apparatus and a device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Mar 26, 2013·4 cites·20 claims
- 3778US8003968B2Lithographic apparatus and substrate edge sealASML NETHERLANDS BV·Filed 2008·Granted Aug 23, 2011·3 cites·36 claims
- 3878US7414699B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 19, 2008·12 cites·25 claims
- 3977US10599054B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Mar 24, 2020·0 cites·20 claims
- 4077US9946172B2System for positioning an object in lithographyASML NETHERLANDS BV·Filed 2014·Granted Apr 17, 2018·2 cites·20 claims
- 4177US9213246B2Fluid extraction system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Dec 15, 2015·2 cites·20 claims
- 4277US8976334B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2011·Granted Mar 10, 2015·1 cites·22 claims
- 4376US11537038B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Dec 27, 2022·0 cites·20 claims
- 4476US9176393B2Lithographic apparatus and a method of operating the apparatusCLOIN CHRISTIAN GERARDUS NORBERTUS HENDRICUS MARIE·Filed 2009·Granted Nov 3, 2015·5 cites·20 claims
- 4575US11209738B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Dec 28, 2021·0 cites·20 claims
- 4675US9766556B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Sep 19, 2017·1 cites·20 claims
- 4774US12072635B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2021·Granted Aug 27, 2024·0 cites·19 claims
- 4874US10191396B2Lithographic apparatus, object positioning system and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jan 29, 2019·2 cites·20 claims
- 4974US8654309B2Fluid extraction system, lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 18, 2014·3 cites·20 claims
- 5072US10705439B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 7, 2020·0 cites·20 claims
Showing the top 50 of 96 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →