Inventor · disambiguated record
Nikolay Sherbak
Also filed as: SHERBAK NIKOLAY
2 granted patents·2 citations·filing 2018–2022
39Inventor score
Top patents by PatentIndex Score
2 records- 0175US11262591B2System and method for pumping laser sustained plasma with an illumination source having modified pupil power distributionKLA TENCOR CORP·Filed 2018·Granted Mar 1, 2022·2 cites·27 claims
- 0264US11921297B2System and method for pumping laser sustained plasma with an illumination source having modified pupil power distributionKLA CORP·Filed 2022·Granted Mar 5, 2024·0 cites·34 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →