Inventor · disambiguated record
Nicolaas Ten Kate
Also filed as: LOOPSTRA ERIK ROELOF · TEN KATE NICOLAAS
134 granted patents·21 pending applications·509 citations·filing 2003–2025
99Inventor score
Files withASML NETHERLANDS BV117KEMPER NICOLAAS RUDOLF4LAFARRE RAYMOND WILHELMUS LOUIS4TEN KATE NICOLAAS4BECKERS MARCEL3
Top patents by PatentIndex Score
155 records- 0199US11960213B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2023·Granted Apr 16, 2024·2 cites·20 claims
- 0299US11628498B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2022·Granted Apr 18, 2023·3 cites·20 claims
- 0399US11376663B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·4 cites·20 claims
- 0499US11235388B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2020·Granted Feb 1, 2022·4 cites·21 claims
- 0598US10245641B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Apr 2, 2019·11 cites·20 claims
- 0697US10898955B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2019·Granted Jan 26, 2021·7 cites·20 claims
- 0797US9737934B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Aug 22, 2017·9 cites·20 claims
- 0897US9507274B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2013·Granted Nov 29, 2016·14 cites·20 claims
- 0997US9442395B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2013·Granted Sep 13, 2016·20 cites·20 claims
- 1097US8031325B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Granted Oct 4, 2011·13 cites·20 claims
- 1196US11754929B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2022·Granted Sep 12, 2023·1 cites·20 claims
- 1296US7804577B2Lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Sep 28, 2010·26 cites·44 claims
- 1396US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 1496US7701550B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 20, 2010·45 cites·42 claims
- 1596US7602470B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 13, 2009·20 cites·21 claims
- 1696US7411654B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 12, 2008·22 cites·58 claims
- 1795US9507275B2Support apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Nov 29, 2016·10 cites·20 claims
- 1895US9454089B2Substrate table, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Sep 27, 2016·4 cites·20 claims
- 1995US7656501B2Lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Feb 2, 2010·22 cites·31 claims
- 2095US7652746B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jan 26, 2010·22 cites·50 claims
- 2194US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 2294US9268238B2Substrate table, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Feb 23, 2016·4 cites·20 claims
- 2393US10875096B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2017·Granted Dec 29, 2020·2 cites·33 claims
- 2493US9857695B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jan 2, 2018·3 cites·20 claims
- 2593US9488923B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Nov 8, 2016·4 cites·20 claims
- 2692US12366808B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2024·Granted Jul 22, 2025·0 cites·20 claims
- 2792US10955757B2Substrate table, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Mar 23, 2021·2 cites·20 claims
- 2892US7751027B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 6, 2010·18 cites·65 claims
- 2991US9423699B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2011·Granted Aug 23, 2016·7 cites·20 claims
- 3091US8730448B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted May 20, 2014·9 cites·19 claims
- 3191US8144305B2Lithographic apparatus and device manufacturing methodLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2006·Granted Mar 27, 2012·14 cites·36 claims
- 3290US9013683B2Substrate table, a lithographic apparatus and a device manufacturing methodTEN KATE NICOLAAS·Filed 2011·Granted Apr 21, 2015·4 cites·20 claims
- 3389US12353139B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2023·Granted Jul 8, 2025·0 cites·20 claims
- 3489US9857696B2Substrate table, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jan 2, 2018·2 cites·20 claims
- 3589US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 3689US2025306471A1Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 3788US7834974B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Nov 16, 2010·9 cites·22 claims
- 3888US7411658B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 12, 2008·8 cites·32 claims
- 3987US10495984B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Dec 3, 2019·1 cites·20 claims
- 4087US9268236B2Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holderJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Feb 23, 2016·5 cites·27 claims
- 4186US12204255B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 4286US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 4386US10209629B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Feb 19, 2019·1 cites·20 claims
- 4486US10120292B2Support apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Nov 6, 2018·2 cites·20 claims
- 4586US9448494B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Sep 20, 2016·3 cites·20 claims
- 4685US9927715B2Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Mar 27, 2018·2 cites·20 claims
- 4785US9588437B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Mar 7, 2017·2 cites·20 claims
- 4884US12055862B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2022·Granted Aug 6, 2024·0 cites·20 claims
- 4984US7251013B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 31, 2007·21 cites·29 claims
- 5083US11281115B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2020·Granted Mar 22, 2022·1 cites·20 claims
Showing the top 50 of 155 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →