Inventor · disambiguated record
Noriaki Imai
Also filed as: IMAI NORIAKI
3 granted patents·5 pending applications·349 citations·filing 2005–2023
72Inventor score
Top patents by PatentIndex Score
8 records- 0197US8703002B2Plasma processing apparatus, plasma processing method and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Apr 22, 2014·343 cites·8 claims
- 0276US7767055B2Capacitive coupling plasma processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Aug 3, 2010·5 cites·17 claims
- 0361US7758929B2Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2007·Granted Jul 20, 2010·1 cites·10 claims
- 0460US2024035903A1Wafer temperature sensor including optical fiber, wafer temperature sensor system, and method of manufacturing wafer temperature sensorSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0553US2009047795A1Plasma processing apparatus, plasma processing method and storage mediumTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0650US2022223384A1Apparatus for manufacturing a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 0744US2010252198A1Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 0843US2006081337A1Capacitive coupling plasma processing apparatusHIMORI SHINJI·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →