Inventor · disambiguated record
Nobuhiko Mouri
Also filed as: MOURI NOBUHIKO
7 granted patents·4 pending applications·7 citations·filing 2009–2024
74Inventor score
Top patents by PatentIndex Score
11 records- 0181US8356376B2Substrate cleaning apparatus, substrate cleaning method, and storage mediumTOKYO ELECTRON LTD·Filed 2009·Granted Jan 22, 2013·6 cites·21 claims
- 0278US12230515B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Granted Feb 18, 2025·0 cites·4 claims
- 0372US11139182B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Oct 5, 2021·1 cites·12 claims
- 0468US11887869B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 30, 2024·0 cites·4 claims
- 0553US2024162052A1Substrate processing apparatus, substrate processing method, and substrateTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0648US2010108095A1Substrate processing apparatus and substrate cleaning methodTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0746US2009313776A1Substrate cleaning apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0843US11482428B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Oct 25, 2022·0 cites·4 claims
- 0942US9095953B2Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrateNAKAMORI MITSUNORI·Filed 2011·Granted Aug 4, 2015·0 cites·9 claims
- 1039US10665478B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted May 26, 2020·0 cites·12 claims
- 1130US2010307539A1Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored thereinTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →